• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>2017 32nd Symposium on Microelectronics Technology and Devices >The effect of temperature on the sensitivity of a eight-terminal silicon piezotransducer
【24h】

The effect of temperature on the sensitivity of a eight-terminal silicon piezotransducer

机译：温度对八端硅压电换能器灵敏度的影响

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

An eight terminal silicon piezotransducer (8TSP) was designed to be used as stress sensor, however, sensors based in the piezoresistivity effect have a large thermal drift of their characteristics due the dependence of the piezocoefficients with temperature. In this work, the temperature effect over the piezotransducer is observed and characterized, important information for an accurate measurement of the strain and to propose design strategies to compensate the piezotransducer output. The 8TSP is tested under controlled uniaxial stress at temperatures within the range [268K 353K], the output voltage is recorded and it is observed that sensitivity decrease with the temperature. Kanda's model is used to describe the relationship between piezoresistivity, temperature and doping concentration, introducing a correction factor P (N, T) for the piezocoefficients which decrease with temperature. The experimental sensitivity for each temperature is normalized and compared with the analytical value for the correction factor P(N, T) for low doping concentration, and seems to fit the proposed model.
机译：设计了一个八端硅压电换能器（8TSP）作为应力传感器，但是，基于压阻效应的传感器由于其压电系数随温度的变化而具有很大的特性热漂移。在这项工作中，观察并表征了压电换能器的温度效应，这是准确测量应变的重要信息，并提出了补偿压电换能器输出的设计策略。在受控的单轴应力下，在[268K 353K]范围内的温度下测试8TSP，记录输出电压，并观察到灵敏度随温度降低。用Kanda模型描述压阻，温度和掺杂浓度之间的关系，并引入随温度降低的压电系数校正因子P（N，T）。对每种温度的实验灵敏度进行了归一化，并与低掺杂浓度的校正因子P（N，T）的分析值进行了比较，似乎符合所提出的模型。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号