Characterization of Organics in UPW with LC-OCD (Liquid Chromatography ― Organic Carbon Detection) Using Sample Pre-Concentration: Preliminary Results

机译：使用样品预浓缩的LC-OCD（液相色谱-有机碳检测）表征UPW中的有机物：初步结果

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First results of LC-OCD analysis for the characterization of organics in ultrapure water (UPW) in low-ppb and sub-ppb waters after 10 and 20-fold pre-concentration with rotary evaporation are presented. It is shown that LC-OCD is a promising tool to localize the sources for organic impurities in UPW. The studies should be continued in clean room facilities using other pre-concentration techniques already existing on the market. With this paper the author wants to encourage others to participate in this field of research.

机译：给出了LC-OCD分析的初步结果，该分析结果是对低ppb和亚ppb水中的超纯水（UPW）中的有机物进行了10倍和20倍的预浓缩后，进行了旋转蒸发。结果表明，LC-OCD是定位超纯水中有机杂质来源的有前途的工具。应当使用市场上已有的其他预浓缩技术在洁净室设施中继续研究。作者希望通过本文鼓励其他人参与这一研究领域。

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《22nd Annual Semiconductor Pure Water and Chemicals Conference Feb 17-19, 2003 Santa Clara, CA》|2003年|p.16-32|共17页
会议地点 Santa Clara CA(US)
作者
Stefan A. Huber;
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DOC-LABOR DR HUBER Eisenbahnstr. 36, 76229 Karlsruhe, Germany;

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原文格式 PDF
正文语种 eng
中图分类化学工业;
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Characterization of Organics in UPW with LC-OCD (Liquid Chromatography ― Organic Carbon Detection) Using Sample Pre-Concentration: Preliminary Results

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