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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Fabrication of Microcomponents by Micromachining and Injection Molding
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Fabrication of Microcomponents by Micromachining and Injection Molding

机译：通过微加工和注塑成型制造微组件

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The economic success of microsystems products decisicely depends on the availability of manufacturing processes suitable for medium and large-scale production. Injection molding of micro components represents such a technology. As mold inserts, master structures made by mechanical micromachining or alternative processes have to be used. There are many examples of replications using diamond-cut mold inserts made of brass. Minimum diamond tool diameters are 200μm for end-milling, and tool dimensions of 50μm cutting edge width or 15° tip angle for fly-cutting. For end-milling, even smaller tools and structures are required, and a change of the workpiece material from brass to steel is desired for wear and hardness reasons. Recent approaches cover the fabrication of burr-free mold inserts made of hardened steel for the replication of fluidic devices and the realization of smooth freeform structures using straight and tungsten carbide ball end-mills with diameters smaller than 200μm. Actually, micro injection molding allows the manufacturing of precision products characterized by minimal wall thicknesses of 20μm, aspect ratios up to 20 or structural details of 200nm. Good examples of micro injection molded devices are multi fiber connectors with 16 multimode channels or containers for 3D cell culture systems using micromechanically cut mold inserts. New kinds of micro injection molding exhibit rather great potentials for enhanced mounting processes and reduced fabrication costs. For fabrication of metal or ceramic microstructures, the powder injection molding process including debinding and sintering is under development. Minimum structural details are presently in the range of 50μm or, in certain cases, less than 20μm. By using submicron ceramic powders, sufficient surface quality and replication accuracy have been achieved.
机译：微系统产品的经济成功主要取决于适合中型和大规模生产的制造工艺的可用性。微型部件的注塑成型就是这种技术。作为模具嵌件，必须使用通过机械微加工或替代工艺制成的母模结构。使用黄铜制成的钻石切割模具嵌件有许多复制示例。端面铣削的最小金刚石刀具直径为200μm，飞边切削的刀具尺寸为50μm的切削刃宽度或15°的顶角。对于立铣刀，甚至需要更小的工具和结构，并且出于磨损和硬度的原因，需要将工件材料从黄铜更改为钢。最近的方法包括制造用于复制流体装置的，由淬硬钢制成的无毛刺模具嵌件，以及使用直径小于200μm的直型和碳化钨球头铣刀实现平滑的自由形式结构。实际上，微注射成型可以制造具有最小壁厚20μm，长宽比高达20或200nm结构细节的精密产品。微注射成型设备的好例子是具有16个多模通道的多光纤连接器或使用微机械切割模具插件的3D细胞培养系统容器。新型的微注射成型具有巨大的潜力，可用于增强安装过程并降低制造成本。为了制造金属或陶瓷的微结构，正在研发包括脱脂和烧结的粉末注射成型工艺。目前，最小的结构细节在50μm的范围内，或者在某些情况下小于20μm。通过使用亚微米陶瓷粉末，已经获得了足够的表面质量和复制精度。

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