Evaluation of Thermal Drift of Nano-CMM

机译：纳米三坐标测量机的热漂移评估

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摘要

We have started developing novel systems and key technology as "Nano-CMM project". In this project, our intention is developing the CMM with nanometer resolution to measure three-dimensional positions, orientations and parameters of three-dimensional features. For developing Nano-CMM, we established the specifications and the key elements of each factor. In this report, the thermal drift of X and Y stages of Nano-CMM were evaluated. Then we made the new prototype of Nano-CMM made of low thermal expansion iron steel to reduce the influence of thermal drift.

机译：我们已经开始开发新颖的系统和关键技术，称为“纳米CMM项目”。在此项目中，我们的目的是开发具有纳米分辨率的CMM，以测量三维特征的三维位置，方向和参数。为了开发Nano-CMM，我们建立了每个因素的规格和关键要素。在此报告中，评估了纳米CMM的X和Y级的热漂移。然后，我们制作了由低热膨胀率的钢铁制成的Nano-CMM的新原型，以减少热漂移的影响。

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来源
《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.306-309|共4页
会议地点 Turin(IT)
作者
K. Takamasu; M. Fujiwara; A. Yamaguchi; M. Hiraki; S. Ozono;
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作者单位

Department of Precision Engineering, The University ot Tokyo, Japan;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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Evaluation of Thermal Drift of Nano-CMM

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