Metrology and manufacturing of coherence preserving synchrotron X-ray optics

机译：相干保持同步加速器X射线光学器件的计量学和制造

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The first manufacturing trials show that, by associating the metrology potential of the third generation synchrotrons with newer machining processes, Angstrom figure errors are achievable in a near future, This opens new applications for diffraction limited microfocusing at high energy with better than 100 nanometer resolution and high speed, good contrast holotomography.

机译：首次制造试验表明，通过将第三代同步加速器的计量潜力与较新的加工工艺相关联，可在不久的将来实现Angstrom图形误差。这为在高能量下具有优于100纳米分辨率的高衍射极限微聚焦技术开辟了新的应用领域。高速，高对比度的全息照相术。

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《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.434-435|共2页
会议地点 Turin(IT)
作者
O.Hignette; P.CIoetens;
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作者单位

ESRF, BP220, Grenoble CEDEX, France;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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2. Advances in X-ray optics: From metrology characterization to wavefront sensing-based optimization of active optics [J] . Daniele Cocco, Mourad Idir, Daniel Morton, Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2018,第NOVa1期

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4. Metrology and manufacturing of coherence preserving synchrotron X-ray optics [C] . euspen European society for precision engineering and nanotechnology International Conference, european society for precision engineering and nanotechnology . 2001

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Metrology and manufacturing of coherence preserving synchrotron X-ray optics

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