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首页> 外文会议>8th International conference on commercialization of micro and nano systems (COMS 2003) >MEMS PROCESSES STANDARDS - WE KNOW WE WANT IT, BUT HOW DO WE OVERCOME THE DESIGNER'S DILEMMAS?
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MEMS PROCESSES STANDARDS - WE KNOW WE WANT IT, BUT HOW DO WE OVERCOME THE DESIGNER'S DILEMMAS?

机译：MEMS工艺标准-我们知道我们想要它，但是我们如何克服设计人员的难题？

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The debate continues: to design into a process or to develop a process to enable a design. The MEMS community has moved slowly towards an acceptable process standard and for good reasons. First, we have the volume of product spaces each with its own physics domains that each product group is affecting or sensing. Second, MEMS foundries offer unique capabilities but due to the lack of overlap from design to design-extensive short loop tests are required to qualify a process. Third, the vast number of competing tools/technologies each promises an advantage over its competitor in one or more capabilities. Finally, the lack of control or process monitors that enable real time statistical control of wafers in process. To focus the debate an introduction to Manufacturing Cluster Platforms (MCP) will be presented. MCP's and how they might be leveraged across the Industry will be discussed. Additionally, it will be suggested that the champion of this monumental task be an Industry respected not-for-profit consortium (i.e. MANCEF/NIST/SEMI). The key components of the MCP's and the establishment of a set of in-process and post-process monitors for volume manufacturing will be explored.
机译：辩论仍在继续：将设计纳入流程或开发流程以实现设计。 MEMS社区已经有充分的理由缓慢地朝着可接受的工艺标准发展。首先，我们具有产品空间的数量，每个产品空间都有其自己的物理域，每个产品组正在影响或感知它们。其次，MEMS代工厂提供独特的功能，但由于从设计到设计缺乏重叠，因此需要进行广泛的短环测试来鉴定工艺。第三，大量竞争工具/技术都有望在一项或多项功能上超越其竞争对手。最后，缺少能够对处理中的晶圆进行实时统计控制的控制或过程监控器。为了集中讨论，将介绍制造集群平台（MCP）。将讨论MCP及其在整个行业中的利用方式。此外，建议这项艰巨任务的支持者是行业界公认的非营利性财团（即MANCEF / NIST / SEMI）。将探讨MCP的关键组成部分，以及建立一套用于批量生产的过程中和过程后监视器的方法。

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