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New capabilities for predicting image degradation from optical surface metrology data

机译：从光学表面度量数据预测图像退化的新功能

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摘要

Image degradation due to scattered radiation form residual optical fabrication errors is a serious problem in many short wavelengths imaging system. Most currently-available image analysis codes require the bidirectional scattering distribution function (BSDF) data as an input in order to calculate the image quality from such systems. This BSDF data is difficult to measure and rarely available for the operational wavelengths of interest. Since the smooth-surface approximation is often not satisfied at these short wavelengths, the classical Rayleigh-Rice expression that indicates the BSDF is directly proportional to the surface PSD cannot be used to calculate BSDFs from surface metrology data for even slightly rough surfaces. An FFTLog numerical Hankel transform algorithm enables the practical use of the computationally intensive Generalized Harvey-Shack surface scatter theory to calculate BRDFs for increasingly short wavelengths that violate the smooth surface approximation implicit in the Rayleigh-Rice surface scatter theory. A generalized Peterson analytical scatter model is then used to make accurate image quality predictions. The generalized Peterson model is numerically validated by both ASAP and ZEMAX.
机译：在许多短波长成像系统中，由于残留的光学制造误差引起的散射辐射造成的图像劣化是一个严重的问题。当前大多数可用的图像分析代码都需要双向散射分布函数（BSDF）数据作为输入，以便从此类系统计算图像质量。 BSDF数据难以测量，并且很少可用于感兴趣的工作波长。由于在这些短波长下通常无法满足光滑表面的近似要求，因此即使是略微粗糙的表面，也无法使用表明BSDF与表面PSD成正比的经典Rayleigh-Rice表达式来计算BSDF。 FFTLog数值汉克尔变换算法使计算密集型通用Harvey-Shack表面散射理论的实际应用可以计算出越来越短的波长的BRDF，这些波长违反了Rayleigh-Rice表面散射理论中隐含的平滑表面近似。然后，使用广义的Peterson分析散射模型进行准确的图像质量预测。通用的Peterson模型已通过ASAP和ZEMAX进行了数值验证。

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  • 来源
    《Advances in metrology for x-ray and EUV optics III》|2010年|p.78010E.1-78010E.8|共8页
  • 会议地点 San Diego CA(US)
  • 作者

    Narak Choi; James E. Harvey; Andrey Krywonos;

  • 作者单位

    Center for Research and Education in Optics and Lasers (CREOL) The University of Central Florida Orlando, Florida 32816;

    Center for Research and Education in Optics and Lasers (CREOL) The University of Central Florida Orlando, Florida 32816;

    Center for Research and Education in Optics and Lasers (CREOL) The University of Central Florida Orlando, Florida 32816;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学计量仪器;
  • 关键词

    Scattering; image degradation;

    机译：散射;图像质量下降;

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