Upgrade of surface profiler for X-ray mirror at SPring-8

机译：在SPring-8上升级X射线镜的表面轮廓仪

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The long trace profiler (LTP) at SPring-8 has been upgraded for the precise measurement of height profiles with upward and horizontal reflection geometries. A compact Fizeau interferometer has been installed in order to measure the radius of curvature of the mechanical bend mirror at beamline. A performance test of the LTP and the Fizeau interferometer has been carried out.

机译：SPring-8的长轨迹轮廓仪（LTP）已升级，可精确测量具有向上和水平反射几何形状的高度轮廓。已安装了紧凑的Fizeau干涉仪，以测量光束线处机械弯曲镜的曲率半径。 LTP和Fizeau干涉仪的性能测试已经进行。

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来源
《Advances in metrology for X-ray and EUV optics V》|2014年|920604.1-920604.6|共6页
会议地点 San Diego CA(US)
作者
Y. Senba; H. Kishimoto; T. Miura; H. Ohashi;
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作者单位

Japan Synchrotron Radiation Research Institute, 1-1-1 Koto, Sayo, Hyogo, Japan 679-5198;

Japan Synchrotron Radiation Research Institute, 1-1-1 Koto, Sayo, Hyogo, Japan 679-5198;

Japan Synchrotron Radiation Research Institute, 1-1-1 Koto, Sayo, Hyogo, Japan 679-5198;

Japan Synchrotron Radiation Research Institute, 1-1-1 Koto, Sayo, Hyogo, Japan 679-5198;

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原文格式 PDF
正文语种 eng
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关键词
Long trace profiler; Fizeau interferometer; gravitational deformation; optical metrology; synchrotron radiation;

机译：长跟踪分析器；菲索干涉仪；重力变形光学计量同步辐射;

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专利

1. Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8 [J] . Y. Senba, H. Kishimoto, H. Ohashi, Nuclear instruments and methods in physics research . 2010,第2a3期

机译：长痕迹轮廓仪的升级，用于表征SPring-8上的高精度X射线镜
2. Creating flat-top X-ray beams by applying surface profiles of alternating curvature to deformable piezo bimorph mirrors [J] . Sutter John P., Alcock Simon G., Kashyap Yogesh, Journal of synchrotron radiation . 2016,第6期

机译：通过将交替曲率的表面轮廓应用于可变形的压电双压电晶片镜来创建平顶X射线束
3. Probing the spatial coherence of wide X-ray beams with Fresnel mirrors at BL25SU of SPring-8 [J] . Takeo Yoko, Motoyama Hiroto, Senba Yasunori, Journal of synchrotron radiation . 2019,第3期

机译：在Spring-8的BL25SU下探讨宽X射线梁的空间相干镜
4. Present status of upgraded long trace profiler for characterization of high-precision X-ray mirrors at SPring-8 [C] . Y. Senba, H. Kishimoto, H. Ohashi, Advances in metrology for x-ray and EUV optics III . 2010

机译：SPring-8上用于表征高精度X射线反射镜的升级长形轨迹轮廓仪的现状
5. Preparation and characterization of nanostructured metal oxides for application to biomass upgrading Polar (111) metal oxide surfaces for pyrolysis oil upgrading and lignin depolymerization. [D] . Finch, Kenneth. 2013

机译：纳米结构金属氧化物的制备和表征，用于生物质的提质用于热解油提质和木质素解聚的极性（111）金属氧化物表面。
6. Creating flat-top X-ray beams by applying surface profiles of alternating curvature to deformable piezo bimorph mirrors [O] . John P. Sutter, Simon G. Alcock, Yogesh Kashyap, -1

机译：通过将交替曲率的表面轮廓应用于可变形的压电双压电晶片镜来创建平顶X射线束
7. Upgrade of beamline BL25SU for soft x-ray imaging and spectroscopy of solid using nano- and micro-focused beams at SPring-8 [O] . Yasunori Senba, Haruhiko Ohashi, Yoshinori Kotani, 2016

机译：升级光束线BL25SU用于软X射线成像和Spring-8的纳米和微聚焦光束的固体光谱
8. 3-D Surface Profile Measurements of Large X-Ray Synchrotron Radiation Mirrors Using Stitiching Interfermetry [R] . Assoufid, L., Bray, M., Qian, J. 2002

机译：利用stitiching干涉法测量大型X射线同步辐射反射镜的三维表面轮廓

Upgrade of surface profiler for X-ray mirror at SPring-8

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