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The Fabrication and Characterisation of Piezoelectric Actuators for Active X-ray Optics

机译:有源X射线光学器件压电致动器的制造与表征

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Piezoelectric actuators are widely employed in adaptive optics to enable an actively controlled mirror surface and improve the optical resolution and sensitivity. Currently two new prototype adaptive X-ray optical systems are under development through the Smart X-ray Optics project in a UK based consortium. One proposed technology is micro-structured optical arrays (MOAs) which uses aligned micro-channels structures obtained by deep silicon etching using both dry and wet techniques and bonded piezoelectric actuators to produce a micro-focused X-ray source for biological applications. The other technology is large scale optics which uses a thin shell mirror segment with 20-40 bonded piezo-actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5").rnThe Functional Materials Group of Birmingham University has the capability of fabricating a wide range of piezo-actuators including, for example, unimorph, bimorph and active fibre composites (AFC) by using a viscous plastic processing technique. This offers flexibility in customising the shapes (from planar to 3-D helix) and feature sizes (>20 μm) of the actuators, as well as achieving good piezoelectric properties. PZT unimorph actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Precise controls on the dimension, thickness, surface finishing and the curvature have been achieved for delivering satisfactory actuators. Results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the progress on the large optic and MOAs prototypes employing the piezo-actuators.
机译:压电致动器广泛应用于自适应光学器件中,以实现主动控制的镜面并提高光学分辨率和灵敏度。当前,通过位于英国的财团的Smart X-ray Optics项目正在开发两个新的原型自适应X射线光学系统。一种提出的技术是微结构光学阵列(MOA),其使用通过使用干法和湿法技术以及粘结压电致动器进行深硅蚀刻而获得的对准的微通道结构,以产生用于生物应用的微聚焦X射线源。另一项技术是大型光学系统,该技术使用具有20-40个粘结压电致动器的薄壳反射镜部分,用于下一代X射线望远镜,其目标是获得比Chandra当前可获得的分辨率更高的分辨率(0.5“)。 rn伯明翰大学功能材料小组有能力通过使用粘性塑料加工技术来制造各种压电致动器,包括单压电晶片,双压电晶片和活性纤维复合材料(AFC)。这为定制形状提供了灵活性(从平面到3D螺旋)和特征尺寸(> 20μm)的致动器,并获得良好的压电性能,根据拟议的镜面和阵列结构的设计和实现,该程序正在开发PZT单压电晶片致动器。已经实现了尺寸,厚度,表面光洁度和曲率的精确控制,以提供令人满意的执行器。这种压电致动器的制造和表征,以及采用该压电致动器的大型光学和MOA原型的进展。

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