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PREPARATION, CHARACTERIZATION AND GAS SENSING PROPERTIES OF NANOMETER TIN OXIDE

机译:纳米氧化锡的制备,表征和气敏特性

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摘要

A low temperature plasma enhanced chemical vapor deposition (PECVD) technique has been employed to produce ultrafine tin oxide powders. Structural features and phase transition of this material have been characterized using differantial thermal analysis (DTA), thermogravimetric analysis (TGA), X-ray diffraction, infrared spectrum (IR) and transmission electron microscopy (TEM). The oxygen absorption behavior and gas sensing properties have been investigated by electron paramagnetic resonance (EPR), X-ray photoclectron spectrum (XPS) and electrical measurements. Thick-film gas sensors made from such ultrafine SnO_2 powders yield better sensitivities than those of normal undoped SnO_2 gas sensors. A gas sensing reaction mechanism is also presented.
机译:低温等离子体增强化学气相沉积(PECVD)技术已用于生产超细氧化锡粉末。该材料的结构特征和相变已通过差热分析(​​DTA),热重分析(TGA),X射线衍射,红外光谱(IR)和透射电子显微镜(TEM)进行了表征。通过电子顺磁共振(EPR),X射线光电子电子能谱(XPS)和电学测量研究了氧的吸收行为和气体传感特性。由这种超细SnO_2粉末制成的厚膜气体传感器比普通的未掺杂SnO_2气体传感器具有更高的灵敏度。还提出了一种气敏反应机理。

著录项

  • 来源
    《Chemical sensors》|1995年|119-122|共4页
  • 会议地点 Xian(CN);Xian(CN)
  • 作者

    Y. Liu; W. Zhu; Y. Shen; X. Yao;

  • 作者单位

    Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263;

    Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263;

    Department of Materials Science, University of Science and Technology of China, Hefei 230026, China;

    Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 电子元件、组件;电感器、线圈、扼流圈;
  • 关键词

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