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首页> 外文会议>CMP-MIC Catalog no.05 IMIC - 1000P; International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference(CMP-MIC); 20050223-25; Fremont,CA(US) >A Novel Rotary Pad Material for Improved Lifetime in Cu CMP
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A Novel Rotary Pad Material for Improved Lifetime in Cu CMP

机译：新型可延长Cu CMP使用寿命的旋转垫材料

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摘要

Praxair Electronics has developed a novel rotary polishing pad that offers a number of benefits when compared to first generation CMP consumables. Based on a proprietary processing technology developed for linear polishing applications, porosity is introduced through controlled foaming of a urethane prepolymer with nitrogen. Through this method, the cellular structure of the final pad can be readily modified by simple alteration of process variables. Additionally, macroscopic pad properties (such as density, hardness and mechanical properties) can be easily controlled. When compared to other commonly-used manufacturing processes, the method used to produce the Praxair material has shown to be inherently less variable. A number of applications studies have been performed to compare the Praxair Electronics' pad (PE-2200) to the industry standard pad. In this presentation, typical polishing process performance results (i.e., removal rate, non-uniformity) in a Cu CMP polishing process will be shown as well as the effect of the polishing process on pad wear and service lifetime. As in prior oxide CMP studies, a significant difference in overall service lifetime between the Praxair PE-2200 pad and the industry standard material was observed. Compared to the industry standard pad, the PE-2200 exhibited a constant removal rate of polyurethane during repeated conditioning cycles. Not surprisingly, this resulted in a ～ 50% improvement in service lifetime versus the industry standard pad, providing a potentially favorable effect to consumable-related cost-of-ownership.
机译：普莱克斯电子（Praxair Electronics）开发了一种新颖的旋转抛光垫，与第一代CMP耗材相比，它具有许多优点。基于专为线性抛光应用开发的专有加工技术，通过控制氨基甲酸酯预聚物的发泡来引入孔隙率。通过这种方法，可以通过简单地改变工艺变量来容易地改变最终垫的细胞结构。另外，可以很容易地控制宏观的垫片性能（例如密度，硬度和机械性能）。与其他常用制造工艺相比，用于生产Praxair材料的方法固有地具有较小的可变性。已经进行了许多应用研究，以比较Praxair Electronics的打击垫（PE-2200）与行业标准的打击垫。在本演示中，将显示Cu CMP抛光过程中典型的抛光过程性能结果（即去除率，不均匀性）以及抛光过程对垫片磨损和使用寿命的影响。与以前的氧化物CMP研究一样，在Praxair PE-2200垫板和行业标准材料之间发现了总体使用寿命上的显着差异。与行业标准的护垫相比，PE-2200在重复的调理循环中表现出恒定的聚氨酯去除率。毫不奇怪，与行业标准垫片相比，这可以使使用寿命延长约50％，对与消耗品相关的拥有成本产生潜在的有利影响。

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