Precision Tracking Control of Dual-Stage Actuation System for Optical Manufacturing

机译：光学制造双阶段驱动系统的精确跟踪控制

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摘要

Actuators with high linear motion speed, high positioning resolution and long motion stroke are needed in many precision machining systems. In some current systems, voice coil motors (VCMs) are implemented for servo control. While the voice coil motors may provide long motion stroke needed in many applications, the main obstacle that hinders the improvement of the machining accuracy and efficiency is its limited bandwidth. To fundamentally solve this issue, we propose to develop a dual-stage actuation system that consists of a voice coil motor that covers the coarse motion and a piezoelectric stack actuator that induces the fine motion to enhance the positioning accuracy. A flexure hinge-based mechanism is developed to connect these two actuators together. A series of numerical and experimental studies are carried out to facilitate the system design and preliminary control development.

机译：在许多精密加工系统中，需要具有高线性运动速度，高定位分辨率和长运动行程的执行器。在某些当前系统中，音圈电机（VCM）用于伺服控制。虽然音圈马达可以提供许多应用中所需的长行程冲程，但阻碍其加工精度和效率提高的主要障碍是其有限的带宽。为了从根本上解决这个问题，我们建议开发一种双级致动系统，该系统由覆盖粗略运动的音圈电机和引起细微运动的压电叠层致动器组成，以提高定位精度。开发了基于挠性铰链的机构，将这两个致动器连接在一起。为了促进系统设计和初步控制开发，进行了一系列数值和实验研究。

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来源
《Conference on Active and passive smart structures and integrated systems; 20090309-12; San Diego, CA(US)》|2009年|P.72882D.1-72882D.7|共7页
会议地点 San Diego CA(US)
作者
W. Dong; J. Tang;
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作者单位

Department of Mechanical Engineering University of Connecticut, Storrs, CT 06269, USA;

Department of Mechanical Engineering University of Connecticut, Storrs, CT 06269, USA;

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原文格式 PDF
正文语种 eng
中图分类系统科学;
关键词
dual-stage actuation; precision servo control; piezoelectric actuator; voice coil motor; optical manufacturing;

机译：双级驱动；精密伺服控制；压电驱动器；语音线圈电机；光学制造;

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1. Repetitive model predictive control for precise control of complex trajectory tracking in dual-stage actuator systems [J] . Lin Chi-Ying, Chang Chih-Yuan Proceedings of the Institution of Mechanical Engineers . 2017,第I3期

机译：重复模型预测控制，可精确控制双级执行器系统中的复杂轨迹跟踪
2. Optimal Preview Control of a Dual-Stage Actuator System for Triangular Reference Tracking [J] . Wang L., Zheng J., Fu M. Control Systems Technology, IEEE Transactions on . 2014,第6期

机译：三角参考跟踪的双阶段执行器系统的最优预览控制
3. Nonlinear Tracking Control for a Hard Disk Drive Dual-Stage Actuator System [J] . Zheng J., Fu M., Wang Y., IEEE / ASME Transactions on Mechatronics . 2008,第5期

机译：硬盘驱动器双阶段执行器系统的非线性跟踪控制
4. Precision Tracking Control of Dual-Stage Actuation System for Optical Manufacturing [C] . W. Dong, J. Tang Conference on Active and passive smart structures and integrated systems . 2009

机译：用于光学制造的双级致动系统的精确跟踪控制
5. Short seeking and settling control for single actuator and dual-stage actuator hard disk drive servo systems. [D] . Yang, Li. 2008

机译：单执行器和双执行器硬盘驱动器伺服系统的短查找和稳定控制。
6. Tracking Control of a Maglev Vibration Isolation System Based on a High-Precision Relative Position and Attitude Model [O] . Qianqian Wu, Bilong Liu, Ning Cui, 2019

机译：基于高精度相对位置和姿态模型的磁悬浮隔振系统的跟踪控制
7. Nonlinear Tracking Control for a Hard Disk Drive Dual-Stage Actuator System [O] . Jinchuan Zheng, Minyue Fu, Youyi Wang, 2007

机译：硬盘驱动器双级执行器系统的非线性跟踪控制
8. Vibration control for precision manufacturing using piezoelectric actuators [R] . Martinez, D. R. , Hinnerichs, T. D. , Redmond, J. M. 1995

机译：使用压电致动器进行精密制造的振动控制

Precision Tracking Control of Dual-Stage Actuation System for Optical Manufacturing

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