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首页> 外文会议>Conference on Advanced Materials and Devices for Sensing and Imaging, Oct 17-18, 2002, Shanghai, China >Quantitative phase measurement interference microscope for transparent objects
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Quantitative phase measurement interference microscope for transparent objects

机译：透明物体的定量相位测量干涉显微镜

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摘要

We present a new interference microscope for quantitative measurement of transparent objects. High precision measurement is achieved by applying the phase-shifting interferometry to an ordinary transmission optical microscope. In that microscope, a bi-prism inserted between a magnifying lens and an observation plane is used as both a beam splitter and a phase shifter. The phase shift required for phase extraction using the phase-shifting technique is introduced by laterally shifting the bi-prism with a piezoelectric transducer. The diffraction caused by the vertex of the bi-prism is avoided by placing a thin wire at the center position of an intermediate image plane. Experimental results for measuring the refractive index distribution of an optical waveguide and the thickness of a biological sample are presented to demonstrate the usefulness of the this method.
机译：我们提出了一种用于定量测量透明物体的新型干涉显微镜。通过将相移干涉术应用于普通的透射光学显微镜可以实现高精度的测量。在该显微镜中，插入在放大镜和观察平面之间的双棱镜既用作分束器又用作移相器。通过使用压电换能器横向移动双棱镜来引入使用相移技术进行相提取所需的相移。通过在中间像平面的中心位置放置细线，可以避免由双棱镜的顶点引起的衍射。给出了用于测量光波导的折射率分布和生物样品的厚度的实验结果，以证明该方法的实用性。

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