Transfer of diffractive optical elements into GaAs by use of inductively coupled plasma etching for integration with vertical-cavity surface-emitting lasers

机译：通过使用电感耦合等离子体蚀刻将衍射光学元件转移到GaAs中，以与垂直腔面发射激光器集成

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Transfer of diffractive optical structures from resist into GaAs, by use of direct-write electron-beam litography followed by dry etching in an inductively-coupled plasma is demonstrated. Our goal is to monolithically integrate diffractive structures with VCSELs.

机译：通过使用直接写入电子束光刻技术，然后在感应耦合等离子体中进行干法蚀刻，证明了衍射光学结构从抗蚀剂转移到GaAs中。我们的目标是将衍射结构与VCSEL单片集成。

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《Conference on Diffractive Optics and Micro-Optics June 18-22, 2000 Quebec City, Canada》|2000年|p.120-122|共3页
会议地点 Quebec(CA);Quebec(CA)
作者
Mikael karlsson; Fredrik Nikolajeff; Hans Martinsson; Anders Larsson;
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正文语种 eng
中图分类物理学;
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专利

1. Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping [J] . Martinsson H., Bengtsson J. IEEE Photonics Technology Letters . 1999,第5期

机译：垂直腔面发射激光器和衍射光学元件的单片集成，用于高级光束整形
2. Fabrication and characterization of InGaAsP/InP double shallow-ridge rectangular ring laser photonic integration circuits by cascade reactive ion etching/inductively coupled plasma etching [J] . R. Zhang, Z. Ren, S. Yu Journal of Vacuum Science & Technology . 2008,第2期

机译：级联反应离子刻蚀/电感耦合等离子体刻蚀InGaAsP / InP双浅脊矩形环形激光光子集成电路的制备与表征
3. Fabrication and characterization of InGaAsP/InP double shallow-ridge rectangular ring laser photonic integration circuits by cascade reactive ion etching/inductively coupled plasma etching [J] . R. Zhang, Z. Ren, S. Yu Journal of Vacuum Science & Technology . 2008,第2期

机译：级联反应离子刻蚀/电感耦合等离子体刻蚀InGaAsP / InP双浅脊矩形环形激光光子集成电路的制备与表征
4. Transfer of diffractive optical elements into GaAs by use of inductively coupled plasma etching for integration with vertical-cavity surface-emitting lasers [C] . Mikael karlsson, Fredrik Nikolajeff, Hans Martinsson, Conference on diffractive optics and micro-optics . 2000

机译：通过使用电感耦合的等离子体蚀刻将衍射光学元件转移到GaAs中，用于与垂直腔表面发射激光器集成
5. Optical characteristics of vertical-cavity surface-emitting lasers and two dimensional coherently coupled arrays. [D] . Catchmark, Jeffrey Michael. 1995

机译：垂直腔面发射激光器和二维相干耦合阵列的光学特性。
6. Quantum dot vertical-cavity surface-emitting lasers covering the ‘green gap’ [O] . Yang Mei, Guo-En Weng, Bao-Ping Zhang, 2017

机译：覆盖绿色间隙的量子点垂直腔表面发射激光器
7. Dispersive liquid–liquid microextraction combined with laser-induced breakdown spectrometry and inductively coupled plasma optical emission spectrometry to elemental analysis [O] . Gaubeur, Ivanise, Aguirre Pastor, Miguel Ángel, Kovachev, Nikolay, 2015

机译：分散液-液微萃取结合激光诱导击穿光谱和电感耦合等离子体发射光谱法进行元素分析
8. Inductively Coupled Plasma Etching in ICl- and IBr-Based Chemistries: Part I. GaAs, GaSb and AlGaAs; Plasma Chemistries and Plasma Processes [R] . Abernathy, C. R. , Cho, H. , Hahn, Y. B. , 1998

机译：ICl和IBr基化学中的电感耦合等离子体蚀刻：第一部分：Gaas，Gasb和alGaas;等离子体化学和等离子体处理

Transfer of diffractive optical elements into GaAs by use of inductively coupled plasma etching for integration with vertical-cavity surface-emitting lasers

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