Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

机译：用于生物相容性涂层的ZnO半导体材料的物理性能研究

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The paper presents investigation of physical properties of ZnO semiconductor for biomedical applications as a coating layer for example in medical devices and structures. The research was focused on determination of surface topography by SEM method, surface roughness by AFM method, chemical composition by EDS method and crystalline structure of ZnO by Raman spectroscopy. The investigated ZnO coating was deposited by reactive magnetron sputtering on quartz substrate.

机译：本文介绍了用于生物医学应用的ZnO半导体物理特性的研究，例如在医疗设备和结构中用作涂层。研究的重点是通过SEM方法测定表面形貌，通过AFM方法测定表面粗糙度，通过EDS方法测定化学成分以及通过拉曼光谱法确定ZnO的晶体结构。所研究的ZnO涂层通过反应磁控溅射沉积在石英基板上。

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来源
《13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods》|2018年|108300L.1-108300L.4|共4页
会议地点 Szczyrk(PL)
作者
Przemyslaw Struk; Michal A. Borysiewicz;
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作者单位

Department of Optoelectronics, Silesian University of Technology, 2 Krzywoustego Str. 44-100 Gliwice, Poland;

Institute of Electron Technology, 32/46 Lotnikow, 02-668 Warsaw, Poland;

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会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
ZnO semiconductor; biocompatible coating;

机译：ZnO半导体生物相容性涂料;

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Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

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