Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

机译：用于生物相容性涂层应用的ZnO半导体材料物理性质的研究

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The paper presents investigation of physical properties of ZnO semiconductor for biomedical applications as a coating layer for example in medical devices and structures. The research was focused on determination of surface topography by SEM method, surface roughness by AFM method, chemical composition by EDS method and crystalline structure of ZnO by Raman spectroscopy. The investigated ZnO coating was deposited by reactive magnetron sputtering on quartz substrate.

机译：本文介绍了ZnO半导体的物理性质，用于生物医学应用作为涂层，例如在医疗装置和结构中。该研究专注于通过SEM法测定表面形貌，通过AFM方法，化学成分通过RAMAN光谱法通过AFM方法，化学成分和ZnO的晶体结构进行测定。通过在石英底物上通过反应磁控溅射沉积研究的ZnO涂层。

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《Conference on Integrated Optics: Sensors, Sensing Structures, and Methods》|2018年|various paging|共4页
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Przemyslaw Struk; Michal A. Borysiewicz;
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中图分类光学;
关键词
Zinc oxide; Coating; Raman spectroscopy; Semiconductor materials; Oxygen; Phonons; Scanning electron microscopy; Semiconductors; Atomic force microscopy; Surface roughness;

机译：氧化锌;涂层;拉曼光谱;半导体材料;氧气;声子;扫描电子显微镜;半导体;原子力显微镜;表面粗糙度;

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Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

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