• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Conference on MOEMS Display and Imaging Systems, Jan 28-29, 2003, San Jose, California, USA >Micromachined acoustic sensor array with diffraction-based optical interferometric detection
【24h】

Micromachined acoustic sensor array with diffraction-based optical interferometric detection

机译：具有基于衍射的光学干涉检测的微机械声传感器阵列

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A diffraction-based interferometric optical detection method for micromachined acoustic sensors can provide better sensitivity as compared to conventional capacitance detection schemes especially at low frequency range. The optical detection method, complete with optoelectronics readout, can be integrated with a capacitive micromachined acoustic transducer. The method is utilized on a 19x19 capacitive micromachined ultrasonic transducer (cMUT) array to demonstrate ultrasonic imaging of wire targets at 750kHz in air. A silicon photodiode (PD) array is also designed and fabricated in a standard 1.3 μm CMOS technology, and through-wafer etching of holes for optical interconnect is performed on the same silicon platform. Further improvement of displacement sensitivity in a resonant-cavity-enhanced (RCE) acoustic sensor is theoretically analyzed including the loss effect in the mirror, and the theoretical results are experimentally verified by measurements on devices with a thin metallic bottom mirror made of silver.
机译：与常规电容检测方案相比，微机械声传感器的基于衍射的干涉光学检测方法可以提供更好的灵敏度，尤其是在低频范围内。可以将光学检测方法与光电读数一起完成，可以与电容式微机械声换能器集成在一起。该方法在19x19电容式微加工超声换能器（cMUT）阵列上使用，以演示在空中以750kHz频率对导线目标进行超声成像。硅光电二极管（PD）阵列也以标准的1.3μmCMOS技术进行设计和制造，并且在同一硅平台上执行用于光学互连的孔的晶圆通孔蚀刻。从理论上分析了谐振腔增强（RCE）声传感器中位移灵敏度的进一步提高，包括反射镜中的损耗效应，并且通过对具有银制薄金属底镜的设备进行了测量，实验结果验证了理论结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号