Positioning Strategies and Sensor Integration in Tools for Assembly MOEMS

机译：装配MOEMS工具中的定位策略和传感器集成

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Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip-chip at smal and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of stanard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an eccuracy of less than 8 mum by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool Moreover a special optics module for the assembly of flip-chip elements was developed. which can be used in different positioning devices in a manual and automatic moduls.

机译：组装是微系统生产过程中的关键过程。目前在工业上还没有解决特别是中小批量的倒装芯片的自动化和经济组装问题。为了灵活，经济地组装标准和倒装芯片元件，开发了一种工具，该工具可以通过标准的工业机器人组装MOEMS，其精度低于8微米。这是通过将精密定位驱动器和传感器集成到工具中完成的。此外，还开发了用于装配倒装芯片元件的特殊光学模块。可通过手动和自动模块将其用于不同的定位设备。

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来源
《Conference on MOEMS and Miniaturized Systems 18-20 September 2000 Santa Clara, USA》|2000年|p.395-402|共8页
会议地点 Santa Clara CA(US)
作者
Gunther Reinhart; Dirk Jacob;
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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
micro-assembly; flip-chip assembly; positioning strategies; sensor interategies; sensor integration; tool development; optic development;

机译：微型组件倒装芯片组装；定位策略；传感器间质障碍传感器集成；工具开发；光学发展;

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专利

1. Towards toxicity detection using a lab-on-chip based on the integration of MOEMS and whole-cell sensors [J] . Elman NM, Ben-Yoav H, Sternheim M, Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices . 2008,第11期

机译：使用基于MOEMS和全细胞传感器的芯片实验室进行毒性检测
2. Integration Of Steering Angle Sensor With Global Positioning System And Micro-electro-mechanical Systems Inertial Measurement Unit For Vehicular Positioning [J] . JIANCHEN GAO, MARK PETOVELLO, M. ELIZABETH CANNON Journal of Intelligent Transportation Systems . 2008,第4期

机译：转向角传感器与全球定位系统以及用于车辆定位的微机电系统惯性测量单元的集成
3. Fabrication and integration of metal oxide nanowire sensors using dielectrophoretic assembly and improved post-assembly processing [J] . Xiaopeng Li, Erica Chin, Hongwei Sun, Sensors and Actuators . 2010,第2期

机译：使用介电泳组装和改进的组装后加工工艺制造和集成金属氧化物纳米线传感器
4. Positioning Strategies and Sensor Integration in Tools for Assembly MOEMS [C] . Gunther Reinhart, Dirk Jacob, SPIE-The International Society for Optical Engineering Conference on MOMES and miniaturized systems . 2000

机译：装配MOEMS工具中的定位策略和传感器集成
5. GRIPPER-BASED POSITION/FORCE SENSOR DESIGN AND ROBOT HAND MOTION CONTROL DURING ASSEMBLY (EMPLOYMENT, PLATE THEORY, MATING ANALYSIS, CONTROL ALGORITHMS, PART). [D] . LIN, PONAIN. 1985

机译：装配过程中基于抓手的位置/力传感器设计和机器人手运动控制（雇佣，板理论，匹配分析，控制算法，部分）。
6. A Real-Time Tool Positioning Sensor for Machine-Tools [O] . Antonio Ramon Jimenez Ruiz, Jorge Guevara Rosas, Fernando Seco Granja, 2009

机译：用于机床的实时刀具定位传感器
7. Integration of Steering Angle Sensor with Global Positioning System and Micro-Electro-Mechanical Systems Inertial Measurement Unit for Vehicular Positioning [O] . Jianchen Gao, Mark Petovello, M. Elizabeth Cannon 2014

机译：转向角传感器与全球定位系统和微机电系统的集成用于车辆定位的惯性测量单元

Positioning Strategies and Sensor Integration in Tools for Assembly MOEMS

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