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首页> 外文会议>Conference on MOEMS and Miniaturized Systems Ⅱ Oct 22-24, 2001, San Francisco, USA >Silicon Nitride Biaxial Pointing Mirrors with Stiffening Ribs
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Silicon Nitride Biaxial Pointing Mirrors with Stiffening Ribs

机译：带有加强筋的氮化硅双轴指向镜

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摘要

Gold-coated silicon nitride mirrors designed for two orthogonal rotations were fabricated. The devices were patterned out of nitride using surface micromachining techniques, and then released by a sacrificial oxide etch and bulk etching the silicon substrate. Vertical nitride ribs were used to stiffen the members and reduce the curvature of the mirrored surfaces due to internal stress in the nitride and the metal layer. This was accomplished by initially etching the silicon substrate to form a mold that was filled with nitride to create a stiffening lattice-work to support the mirrored section. Mirror diameters ranging from 100 μm to 500 μm have been fabricated, with electrostatic actuation used to achieve over four degrees of tilt for each axis.
机译：制作了设计用于两个正交旋转的镀金氮化硅镜。使用表面微机械加工技术在氮化物上对器件进行构图，然后通过牺牲性氧化物蚀刻和批量蚀刻硅基板将其释放。由于氮化物和金属层中的内应力，垂直的氮化物肋被用于使构件变硬并减小镜面的曲率。这是通过首先蚀刻硅基板以形成一个模具来完成的，该模具中填充有氮化物以形成用于支撑镜面部分的刚性晶格。已制造出直径范围为100μm至500μm的反射镜，并使用静电驱动使每个轴的倾斜度超过4度。

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