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首页> 外文会议>Conference on MOEMS and Miniaturized Systems Ⅱ Oct 22-24, 2001, San Francisco, USA >MOEMS Integrated Optical Monitoring
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MOEMS Integrated Optical Monitoring

机译：MOEMS集成光学监控

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摘要

For certain classes of MEMS, implementation of closed loop feedback control and system model-based fault detection offer significant performance advantages. Such systems include those in safety critical applications and systems in which dynamic loads are anticipated. Detailed continuous knowledge of the positional state of the microstructure is needed in order for accurate system models to be developed and experimentally verified, control techniques to be effectively applied, and model-based fault detection evaluated. Moreover, this positional state information must be fully decoupled from the microstructure voltage drive signal. This paper reviews the group's current efforts exploring the use of integrated optics to provide this MEMS state feedback information and the merits and challenges of its application for microstructure control and fault detection. Modeling and experimental results using a 1.3 micron wavelength coherent optical probe for optical state monitoring will be presented including work integrating the probe optics within a folded diffractive optical element coplanar with the MEMS die. Use of this signal in system model parameter estimation and real-time position control of a lateral comb resonator stage will be demonstrated and the potential for application to MEMS model-based fault detection discussed.
机译：对于某些类型的MEMS，闭环反馈控制和基于系统模型的故障检测的实现提供了显着的性能优势。这样的系统包括那些在安全性至关重要的应用中以及那些预期会有动态负载的系统。为了开发和实验验证精确的系统模型，有效地应用控制技术以及评估基于模型的故障检测，需要对微观结构的位置状态进行详细的连续了解。此外，该位置状态信息必须与微结构电压驱动信号完全去耦。本文回顾了该小组在探索使用集成光学器件提供MEMS状态反馈信息方面的当前努力以及其在微结构控制和故障检测中应用的优缺点。将介绍使用1.3微米波长相干光学探针进行光学状态监测的建模和实验结果，包括将探针光学器件集成在与MEMS芯片共面的折叠衍射光学元件内的工作。将演示该信号在系统模型参数估计和横向梳状谐振器级的实时位置控制中的使用，并讨论在基于MEMS模型的故障检测中应用的潜力。

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