首页> 外文会议>Conference on Optical Design and Testing; 20071112-15; Beijing(CN) >A novel method of lens initial structure selection: study on structures-aperture relationship of finite image distance achromatic spherical microscope objective with larger numerical aperture
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A novel method of lens initial structure selection: study on structures-aperture relationship of finite image distance achromatic spherical microscope objective with larger numerical aperture

机译:镜头初始结构选择的一种新方法:有限数值距离的大数值孔径消色差球面显微镜物镜的结构-孔径关系研究

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摘要

A number of finite image distance achromatic spherical microscope objectives with larger numerical aperture are collected. And the lens system structures are analyzed statistically based on optical design experience. Then a quantitative formula of the relationship between system structure and deflection angle on finite image distance achromatic spherical microscope objective, whose deflection angle is up to 0.3, is proposed. A optical systems for microstructure inspection is obtained on the basis of the fruit. The high resolution system with simple structure is achieved. Accordingly the efficiency of initial structure selection study on achromatic microscope objective (deflection angle up to 0.3) is validated.
机译:收集了许多具有较大数值孔径的有限像距消色差球面显微镜物镜。并根据光学设计经验对镜头系统结构进行统计分析。提出了偏转角最大为0.3的有限像距消色差球面显微镜物镜系统结构与偏转角关系的定量公式。基于水果获得了用于微结构检查的光学系统。实现了结构简单的高分辨率系统。因此,验证了在消色差显微镜物镜(偏转角高达0.3)上进行初始结构选择研究的效率。

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