Key Techniques in an Absolute Measurement Method of Spherical Lens

机译：球面透镜绝对测量方法中的关键技术

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An absolute measurement method of spherical lens with Fiber Point Diffraction Interferometer (FPDI) was developed. To achieve a high accuracy, several key techniques are discussed such as: short coherence length laser, interferogram collecting, experiment set up, and reconstruction of wave front. Through these techniques an experiment system has been built. The 5-step phase shifting interferograms are collected. The wave front is fitted by Zernike polynomials and reconstructed. The repeated measurement result has a good performance compared to a Zygo GPI interferometer.

机译：提出了一种用光纤点衍射干涉仪（FPDI）对球面透镜进行绝对测量的方法。为了获得高精度，讨论了几种关键技术，例如：相干短激光，干涉图采集，实验装置和波前重建。通过这些技术，建立了实验系统。收集5步相移干涉图。波阵面由Zernike多项式拟合并重建。与Zygo GPI干涉仪相比，重复测量的结果具有良好的性能。

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来源
《Conference on Optical Design and Testing; 20071112-15; Beijing(CN)》|2007年|P.iix|共2页
会议地点 Beijing(CN)
作者
Shuo Wu; Tao geng Zhoua; Ding guo Sha; Jia ming Lin; Lin feng Chen;
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作者单位

Beijing Institute of Technology, Department of Optical Eng 421 lab, St 5 south Zhongguancun, 10081 Haidian District, Beijing, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类制造工艺;仪表加工及仪表机床;
关键词
optical measurement; FPDI; point diffraction technique; spherical lens; absolute measurement;

机译：光学测量; FPDI;点衍射技术;球面透镜;绝对测量;

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Key Techniques in an Absolute Measurement Method of Spherical Lens

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