Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer

机译：用宽带波长扫描干涉仪测量透明薄板的厚度

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摘要

A novel broad-band telecom laser source is used to realize a lateral-shear scanning-wavelength interferometer for measuring the thickness of thin plates. We show that the wide tunability range allows to detect samples down to tens of microns with a relative uncertainty of less than 0.5% and a resolution of about 1 nm. A comparable accuracy in the thickness characterization of double-layer structures is also demonstrated. In turn, the wide tunability range needs the dispersion law of the materials to be taken into account in the model for correct thickness evaluation.

机译：一种新型的宽带电信激光源被用于实现用于测量薄板厚度的横向剪切扫描波长干涉仪。我们表明，宽的可调范围允许检测低至数十微米的样品，相对不确定度小于0.5％，分辨率约为1 nm。还证明了在双层结构的厚度表征中可比较的精度。反过来，宽的可调范围需要在模型中考虑材料的色散定律，以进行正确的厚度评估。

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来源
《Conference on Optical Micro- and Nanometrology in Manufacturing Technology; 20040429-20040430; Strasbourg; FR》|2004年|P.64-70|共7页
会议地点 Strasbourg(FR)
作者
P. Maddaloni; G. Coppola; P. De Natale; S. De Nicola; P. Ferraro; M. Gioffre; M. Iodice;
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作者单位

Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (Napoli), Italy;

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原文格式 PDF
正文语种 eng
中图分类机械计算;
关键词
interferometry; thin plates; thickness; dispersion;

机译：干涉测量；薄板；厚度；色散;

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专利

1. Thickness Measurement of Thin Transparent Plates With a Broad-Band Wavelength Scanning Interferometer [J] . P. Maddaloni, G. Coppola, P. De Natale, IEEE Photonics Technology Letters . 2004,第5期

机译：用宽带波长扫描干涉仪测量透明薄板的厚度
2. Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer [J] . Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman, Applied Optics . 2004,第6期

机译：波长扫描菲索干涉仪中同时测量透明平行板的表面形状和光学厚度的变化
3. Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer [J] . Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman, Applied optics . 2004,第6期

机译：在波长扫描菲索干涉仪中同时测量透明平行板的表面形状和光学厚度的变化
4. Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer [C] . P. Maddaloni, G. Coppola, P. De Natale, Optical Micro-and Nanometrology in Manufacturing Technology . 2004

机译：具有宽带波长扫描干涉仪的薄透明板的厚度测量
5. Design, development, and applications of image scanning ellipsometry for the measurement of thin film thickness profiles. [D] . Liu, An-Hong. 1994

机译：图像扫描椭圆仪的设计，开发和应用，用于测量薄膜厚度轮廓。
6. Central Corneal Thickness Measurement Using Ultrasonic Pachymetry Rotating Scheimpflug Camera and Scanning-slit Topography Exclusively in Thin Non-keratoconic Corneas [O] . Mehrdad Mohammadpour, Kazem Mohammad, Nasser Karimi 2016

机译：超声角膜厚度计旋转Scheimpflug相机和扫描狭缝形貌专门用于非圆锥形圆锥形角膜的中央角膜厚度测量
7. Surface and thickness measurement of a transparent film using wavelength scanning interferometry [O] . Gao, F., Muhamedsalih, Hussam, Jiang, Xiangqian 2012

机译：使用波长扫描干涉测量法测量透明薄膜的表面和厚度
8. Measurement of Ultrasonic Fields in Transparent Media Using a Scanning Differential Interferometer [R] . Dockery, G. D., Claus, R. O. 1983

机译：用扫描差分干涉仪测量透明介质中的超声场

Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer

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