Novel methodology for photo condition optimization through simulation

机译：通过仿真优化照片条件的新方法

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

In photo process development, simulation plays a very important role to optimize the photo condition prior to exposure wafers. In this report we would address a systematic methodology to accelerate the photo condition optimization through simulation with the aids of statistical methods. Moreover, this systematic methodology could also be used in any experiment design and emerges as a feasibility of automatic process optimization.

机译：在光工艺开发中，模拟在优化曝光晶片之前的光条件方面起着非常重要的作用。在本报告中，我们将介绍一种系统的方法，以借助统计方法通过仿真来加速照片条件的优化。而且，这种系统的方法学也可以用于任何实验设计中，并作为自动过程优化的可行性而出现。

著录项

来源
《Conference on Optical Microlithography XVII pt.2; 20040224-20040227; Santa Clara,CA; US》|2004年|P.703-712|共10页
会议地点 Santa Clara CA(US)
作者
Irene Yi-Ju Su; Rachel Huang; Tahone Yang; Kevin Tu; Smith Peng; Chih-Yuan Lu;
展开▼
作者单位

Macronix International CO. Ltd. No. 16, Li-Hsin Road, SBIP, Hsinchu, Taiwan, R.O.C.;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类石版印刷;应用光学;
关键词
simulation; optimization; statistics; orthogonal latin hypercube sampling;

机译：模拟;优化;统计;正交拉丁超立方抽样;

相似文献

外文文献
中文文献
专利

1. Optimization of spray break-up CFD simulations by combining Sigma-Y Eulerian atomization model with a response surface methodology under diesel engine-like conditions (ECN Spray A) [J] . Pandal A., Payri R., Garcia-Oliver J. M., Computers & Fluids . 2017,第期

机译：用柴油机状条件下与响应面方法结合Sigma-Y欧拉雾化模型的喷雾分解CFD模拟的优化（ECN喷雾A）
2. A new methodology for sizing hybrid photovoltaic-wind energy system using simulation and optimization tools [J] . Carlos Eduardo Camargo Nogueira, Hans Helmut Zürn, Samuel Nelson Melegari de Souza Acta Scientiarum. Technology . 2005,第1期

机译：利用仿真和优化工具确定混合光伏-风能系统规模的新方法
3. Combination of Chemical Coagulation and Photo-Fenton Oxidation Process for the Treatment of Beet Sugar Industry Wastewater: Optimization of Process Conditions by Response Surface Methodology [J] . Hajiagha Abbas Alipour, Zaeimdar Mojgan, Jozi Seyed Ali, Ozone: Science & Engineering: The Journal of the International Ozone Association . 2019,第3期

机译：化学凝固和光芬氧化过程的组合治疗甜菜糖工业废水：响应面法优化工艺条件
4. Novel methodology for photo condition optimization through simulation [C] . Irene Yi-Ju Su, Rachel Huang, Tahone Yang, Conference on optical microlithography . 2004

机译：通过仿真进行照片条件优化的新型方法
5. Development of numerical methodologies for parameter identification and shape optimization in metal forming simulations =Desenvolvimento de metodologias para identificação de parâmetros e otimização de forma em simulações numéricas de processos de conform [D] . Silva, Raquel Cristina Soares de Carvalho e. 2012

机译：在金属成形模拟中用于参数识别和形状优化的数值方法的发展=在整形过程数值模拟中用于参数识别和形状优化的方法的发展
6. GRIFFIN: A versatile methodology for optimization of protein-lipid interfaces for membrane protein simulations [O] . René Staritzbichler, Claudio Anselmi, Lucy R. Forrest, -1

机译：格里芬：一种多功能的方法用于优化膜蛋白模拟的蛋白质 - 脂质界面
7. Optimization of spray break-up CFD simulations by combining Σ-Y Eulerian atomization model with a response surface methodology under diesel engine-like conditions (ECN Spray A) [O] . A. Pandal, R. Payri, J.M. García-Oliver, 2017

机译：柴油发动机状条件下与响应面法相结合σ-Y欧拉雾化模拟的喷雾分解CFD模拟的优化（ECN喷雾A）

Novel methodology for photo condition optimization through simulation

摘要

著录项

相似文献

相关主题

期刊订阅