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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >Direct-Write of Sensor Devices by a Laser Forward Transfer Technique
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Direct-Write of Sensor Devices by a Laser Forward Transfer Technique

机译：通过激光正向传输技术直接写入传感器设备

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摘要

The use of direct-write techniques in the design and manufacture of sensor devices provides a flexible approach for next generation commercial and defense sensor applications. Using a laser forward transfer technique, we have demonstrated the ability to rapidly prototype temperature, biological and chemical sensor devices. This process, known as matrix assisted pulsed laser evaporation direct-write or MAPLE DW is compatible with a broad class of materials ranging from metals and electronic ceramics to chemoselective polymers and biomaterials. Various types of miniature sensor designs have been fabricated incorporating different materials such as metals, polymers, biomaterials or composites as multilayers or discrete structures on a single substrate. The MAPLE DW process is computer controlled which allows the sensor design to be easily modified and adapted to any specific application. To illustrate the potential of this technique, a functional chemical sensor system is demonstrated by fabricating all the passive and sensor components by MAPLE DW on a polyimide substrate. Additional devices fabricated by MAPLE DW including biosensors and temperature sensors and their performance are shown to illustrate the breadth of MAPLE DW and how this technique may influence current and future sensor applications.
机译：在传感器设备的设计和制造中使用直接写入技术为下一代商业和国防传感器应用提供了一种灵活的方法。使用激光正向传输技术，我们已经展示了快速原型化温度，生物和化学传感器设备的能力。这种被称为基质辅助脉冲激光蒸发直接写入或MAPLE DW的方法与从金属和电子陶瓷到化学选择性聚合物和生物材料的各种材料兼容。已经制造出各种类型的微型传感器设计，其在单个基板上结合了诸如金属，聚合物，生物材料或复合材料之类的多层或离散结构。 MAPLE DW过程由计算机控制，可以轻松修改传感器设计并使其适合任何特定应用。为了说明该技术的潜力，通过MAPLE DW在聚酰亚胺衬底上制造所有无源和传感器组件，演示了功能性化学传感器系统。由MAPLE DW制造的其他设备（包括生物传感器和温度传感器）及其性能被展示来说明MAPLE DW的广度以及该技术如何影响当前和未来的传感器应用。

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