首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >Laser-Based Sample Preparation for Electronic Package Failure Analysis
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Laser-Based Sample Preparation for Electronic Package Failure Analysis

机译:基于激光的样品制备用于电子包装失效分析

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摘要

Failure analysis has come to play a key role in ensuring quality and reliability in semiconductor devices, associated packaging and printed wiring boards. Tools are increasingly available to those investigating high-density integrated circuits at the die level, particularly for edit and repair operations. Until recently however, this capability has been limited by the inherent low-resolution mechanical/manual processes used for destructive analysis on electronics packaging. A laser-based tool has been developed to selectively and locally enable access to traces and layers within packages and provide a way to perform edits to an area of interest.
机译:故障分析已在确保半导体器件,相关包装和印刷线路板的质量和可靠性方面发挥了关键作用。对于在芯片级研究高密度集成电路的人员而言,工具越来越多,特别是对于编辑和修复操作。然而,直到最近,这种能力还受到用于电子封装破坏性分析的固有低分辨率机械/手动过程的限制。已经开发了一种基于激光的工具,可以有选择地在本地访问包装中的迹线和图层,并提供一种对感兴趣区域进行编辑的方法。

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