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首页> 外文会议>Conference on Quantum Sensing and Nanophotonic Devices; 20040125-20040129; San Jose,CA; US >ZnO nanostructures on Si and SiO_2 surfaces by diblock copolymer self-assembly
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ZnO nanostructures on Si and SiO_2 surfaces by diblock copolymer self-assembly

机译：通过双嵌段共聚物自组装在Si和SiO_2表面形成ZnO纳米结构

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摘要

The formation of self-assembled ZnO nanoclusters using diblock copolymers for self-assembly is reviewed and the development of the ZnO nanoclusters within two different copolymer systems - poly styrene-acrylic acid and poly styrene methacrylic acid, with block repeat unit ratios of 159/63 and 318/78, respectively, are reported. Different copolymer systems were used to observe the size dependence of the nanoclusters on the molecular block lengths of the copolymers. The synthesis scheme of the nanoclusters relied on the thermodynamically driven microphase separation of the diblock copolymers in solid phase due to immiscibility of the covalently bonded polymers in the copolymer. The scheme involved the formation of ZnCl_2 nanoclusters on Si and SiO_2 surfaces by doping of the copolymer systems with ZnCl_2 in liquid phase at room temperature and application of the doped solution onto the surfaces by spin-on casting, followed by conversion to ZnO nanoclusters using a new dry technique of ozone exposure. The dry method effectively converted ZnCl_2, without any loss of ZnO during conversion and with better conversion rate than the wet chemical method developed previously. XPS verified the conversion to ZnO and AFM showed the spherical morphology of the nanoclusters. Technique was developed using RIE for obtaining stand-alone nanoclusters on both surfaces.
机译：综述了使用二嵌段共聚物进行自组装形成的自组装ZnO纳米团簇，并研究了两种不同共聚物体系中的ZnO纳米团簇的发展-聚苯乙烯-丙烯酸和聚苯乙烯甲基丙烯酸，嵌段重复单元比率为159/63和318/78，分别报告。使用不同的共聚物体系来观察纳米簇对共聚物分子嵌段长度的尺寸依赖性。纳米团簇的合成方案依赖于固相中双嵌段共聚物的热力学驱动的微相分离，这是由于共聚物中共价键合的聚合物不混溶。该方案包括在室温下在液相中用ZnCl_2掺杂共聚物体系在Si和SiO_2表面上形成ZnCl_2纳米团簇，并通过旋涂法将掺杂的溶液施加到表面上，然后使用硅藻土转化为ZnO纳米团簇。臭氧暴露的新干燥技术。与以前开发的湿化学方法相比，干法有效地转化了ZnCl_2，在转化过程中没有ZnO的损失，并且转化率更高。 XPS验证了向ZnO的转化，AFM显示了纳米团簇的球形形态。使用RIE开发了用于在两个表面上获得独立的纳米团簇的技术。

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