Strategies for successful realization of strong confinement microphotonic devices

机译：成功实现强约束微光子器件的策略

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Microphotonic devices employing strong confinement of light are of growing importance for key applications such as telecommunication and optical interconnects. They have unique and desirable characteristics but their extreme sensitivity to dimensional variations makes them difficult to successfully implement. Here, we discuss strategies towards the successful realization of strong confinement devices. We leverage what planar fabrication technology does best: replicating structures. Although the absolute dimensional control required for successful fabrication of many strong confinement devices is all but impossible to achieve, we show that surprisingly-high relative dimensional accuracy can be obtained on structures in proximity of one another on a wafer. This provides an advantage to schemes that are based on multiple copies of low-complexity structures. These copies can be made nearly identical or with precise relative-dimensional offsets to achieve the desired function. We quantify the achievable relative dimensional control and discuss the first demonstration of multistage filters, integrated polarization diversity, and high-order microring-filter banks.

机译：对于诸如电信和光学互连之类的关键应用，采用强光限制的微光子器件越来越重要。它们具有独特的理想特性，但是对尺寸变化的极端敏感性使其难以成功实现。在这里，我们讨论成功实现强约束装置的策略。我们利用平面制造技术的最佳优势：复制结构。尽管成功制造许多坚固的约束装置所需的绝对尺寸控制几乎不可能实现，但我们表明，在晶圆上彼此相邻的结构上可以获得令人惊讶的高相对尺寸精度。这为基于低复杂度结构的多个副本的方案提供了优势。可以使这些副本几乎相同或具有精确的相对尺寸偏移，以实现所需的功能。我们量化了可实现的相对尺寸控制，并讨论了多级滤波器，集成极化分集和高阶微环滤波器组的首次演示。

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来源
《Conference on Silicon Photonics; 20080121-24; San Jose,CA(US)》|2008年|P.ixiv|共2页
会议地点 San JoseCA(US)
作者
Tymon Barwicz; Milos A. Popovic; Michael R. Watts; Peter T. Rakich; Charles W. Holzwarth; Franz X. Kaertner; Erich P. Ippen; Henry I. Smith;
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作者单位

Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge MA, USA;

IBM T.J. Watson Research Center, Yorktown Heights NY, USA;

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原文格式 PDF
正文语种 eng
中图分类半导体光电器件;
关键词
microphotonics; add-drop filter; microring resonator; microfabrication; resonance frequency;

机译：微光子学;滴滤器;微环谐振器;微细加工;谐振频率;

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Strategies for successful realization of strong confinement microphotonic devices

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