Emission Spectra of Laser-Produced Plasmas for EUV and soft x-ray Sources

机译：EUV和软X射线源的激光产生等离子体的发射光谱

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The plasma emission of tin, aluminum and cupper targets irradiated with laser intensities ranging from 10~(11) to 10~(16) W/cm~2 has been measured between 7 nm and 18 nm. A chirped pulse amplified Ti:Sapphire laser oscillating at 790 nm with either 100 fs or 300 ps pulse duration and a Nd:YAG laser oscillating at 1064 nm with 10 ns pulse duration (fwhm) have been used. The observed plasma emission was strongest for the 300 ps laser pulse irradiation, which might be due to the additional laser plasma heating during plasma formation.

机译：测得锡，铝和铜靶的等离子体发射在7 nm至18 nm之间，激光强度为10〜（11）至10〜（16）W / cm〜2。使用了pulse脉冲放大的Ti：Sapphire激光器，在790 nm处以100 fs或300 ps的脉冲持续时间振荡，以及使用Nd：YAG激光器在1064 nm处以10 ns的脉冲持续时间（fwhm）振荡。对于300 ps的激光脉冲辐照，观察到的等离子体发射最强，这可能是由于等离子体形成过程中额外的激光等离子体加热所致。

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来源
《Conference on Superintense Light Fields and Ultrafast Processes; 20030630-20030704; St.Petersburg; RU》|2003年|P.26-31|共6页
会议地点 St. Petersburg(RU)
作者
Georg SOUMAGNE; Tamotsu ABE; Kenichi IKEDA; Hiroshi KOMORI; Hiroshi SOMEYA; Takashi SUGANUMA; Kazuhisa NAKAJIMA; Akira ENDO;
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作者单位

Extreme Ultraviolet Lithography System Development Association (EUVA) Hiratsuka Research Development Center, 1200 Manda, Hiratsuka, 254-8567 Japan;

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会议组织
原文格式 PDF
正文语种 eng
中图分类激光技术、微波激射技术;
关键词
EUV emission; laser-produced plasma; solid target; plasma emission;

机译：EUV发射；激光产生的等离子体；固体靶标；等离子体发射;

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专利

1. Analysis of soft x-ray emission spectra of laser-produced dysprosium, erbium and thulium plasmas [J] . Sheil John, Dunne Padraig, Higashiguchi Takeshi, Journal of Physics, B. Atomic, Molecular and Optical Physics: An Institute of Physics Journal . 2017,第6期

机译：激光生产的镝，铒和鳞片等离子体软X射线发射光谱分析
2. Opacity effects on soft X-ray spectra from highly charged lanthanide ions in laser-produced plasmas [J] . C. Suzuki, T. Higashiguchi, A. Sasanuma, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2017,第octa1期

机译：不透明性对激光产生的等离子体中高电荷镧系离子对软X射线光谱的影响
3. Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas [J] . Hara Hiroyuki, Arai Goki, Kondo Yoshiki, Applied physics express . 2016,第6期

机译：激光产生的高电荷铂等离子体的软X射线发射特性
4. Emission Spectra of Laser-Produced Plasmas for EUV and soft x-ray Sources [C] . Georg SOUMAGNE, Tamotsu ABE, Kenichi IKEDA, Society of Photo-Optical Instrumentation Engineers Conference on Laser Optics . 2004

机译：用于EUV和软X射线源的激光产生的等离子体的发射光谱
5. Emission characteristics of Nd:YAG and CO2 laser-produced tin plasmas for extreme ultraviolet lithography source development. [D] . Campos, David Daniel. 2010

机译：Nd：YAG和CO2激光产生的锡等离子体的发射特性，可用于极端紫外光刻源的开发。
6. Optical coherence tomography (OCT) with 2 nm axial resolution using a compact laser plasma soft X-ray source [O] . Przemysław Wachulak, Andrzej Bartnik, Henryk Fiedorowicz -1

机译：使用紧凑型激光等离子体软X射线源的2 axialnm轴向分辨率的光学相干断层扫描（OCT）
7. Laser-Produced Heavy Ion Plasmas as Efficient Soft X-Ray Sources [O] . Takeshi Higashiguchi, Padraig Dunne, Gerry OSullivan 2016

机译：激光产生的重离子等离子体作为高效的软X射线源
8. Advanced Source Development and Applications. Laser-Produced Plasmas: A Compact Soft X-Ray Source with High Peak Brightness. [R] . Byer, R. L. 1989

机译：高级源开发和应用。激光产生的等离子体：具有高峰值亮度的紧凑型软X射线源。

Emission Spectra of Laser-Produced Plasmas for EUV and soft x-ray Sources

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