The research of relationships between residual stress and columnar angles in oblique deposition of magnesium fluoride thin films

著录项

• 来源
  《Current developments in lens design and optical engineering XII; and Advances in thin film coatings VII》|2011年|p.81280K.1-81280K.7|共7页
• 会议地点 San Diego CA(US);San Diego CA(US)
• 作者

  Cheng-Chung Jaing; Ming-Chung Liu; Wen-Hao Cho; Chien-Jen Tang; Yeuh-Yeong Liou; Jun-Yuan Wang; Cheng-Chung Lee;

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• 作者单位

  Dept. of Optoelectronic System Engineering/Dept. of Electronic Engineering, Minghsin Univ. of Science Technology, Hsin-Chu 304, Taiwan;

  Dept. of Optics and Photonics/ Thin Film Technology Center, National Central Univ., Chung-Li 320, Taiwan;

  Dept. of Optics and Photonics/ Thin Film Technology Center, National Central Univ., Chung-Li 320, Taiwan;

  Dept. of Optoelectronic System Engineering/Dept. of Electronic Engineering, Minghsin Univ. of Science Technology, Hsin-Chu 304, Taiwan;

  Dept. of Electronic Engineering, Chienkuo Technology Univ., Chang-Hua 500, Taiwan;

  Dept. of Optoelectronic System Engineering/Dept. of Electronic Engineering, Minghsin Univ. of Science Technology, Hsin-Chu 304, Taiwan;

  Dept. of Optics and Photonics/ Thin Film Technology Center, National Central Univ., Chung-Li 320, Taiwan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;
• 关键词

  MgF_2 film; substrate temperature; columnar microstructure; columnar angle; deposition angle; residual stress; thermal stress; phase-shifting twyman-green interferometer;

  机译：MgF_2膜；基板温度柱状组织柱状角沉积角残余应力热应力移相特曼绿干涉仪;