Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics

机译：在InP上沉积溶胶-凝胶衍生的无机和复合材料薄膜以用于集成光学

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Abstract: In this paper, we present the fabrication of sol-gel derived silica based films on InP using both inorganic and composite material precursors. Thin silica films with thicknesses less than 0.5 $mu@m are achieved using an inorganic precursor by means of multiple spin coatings and rapid thermal processing at an annealing temperature of 450 degrees C. The cracking pattern of the inorganic silica film on InP is analyzed. Thick films are derived from composite materials by multiple spin coatings with only furnace baking at 150 degrees C. In addition, the different properties of each type of films and their potential applications in terms of monolithic integration are discussed. !30

机译：摘要：在本文中，我们介绍了使用无机和复合材料前体在InP上制备溶胶-凝胶衍生的二氧化硅基薄膜。使用无机前体，通过多次旋涂并在450℃的退火温度下进行快速热处理，获得厚度小于0.5μm的薄二氧化硅膜。分析了无机二氧化硅膜在InP上的破裂图案。厚膜是通过仅在150摄氏度的炉中烘烤通过多次旋涂从复合材料中获得的。此外，还讨论了每种类型的膜的不同特性及其在整体集成方面的潜在应用。！30

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来源
《Design, Fabrication, and Characterization of Photonic Devices》|1999年|p.417-424|共8页
会议地点 Singapore(SG)
作者
Jian Liu; Nanyang Technological Univ.; Singapore; Singapore; YeeLoy Lam; Nanyang Technological Univ.; Singapore NA; Singapore; YuenChuen Chan; Nanyang Technological Univ.; Singapore; Singapore; Yan Zhou; Nanyang Technological Univ.; Singapore; Singapore;
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4. Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics [C] . Jian Liu, YeeLoy Lam, YuenChuen Chan, Conference on design, fabrication, and characterization of photonic devices . 1999

机译：在INP上沉积溶胶 - 凝胶衍生的无机和复合材料膜进行INP进行集成光学器件
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机译：有机和无机光学材料的特殊用品。用混合有机材料对硝基苯胺和对二氰基苯掺杂掺杂氧化聚合物膜的电光效应。

Deposition of sol-gel-derived inorganic and composite material films on InP for integrated optics

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