A Parametrically Amplified MEMS Gyroscope

机译：参数放大的MEMS陀螺仪

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This paper reports the experimental results of parametric amplification applied to a MEMS gyroscope. In thisrnwork parametric amplification of both the primary and sensed modes of vibration are demonstrated. Open looprnamplification approaching two orders of magnitude is shown for the primary mode. In closed-loop operation,rnamplification of the primary mode by a factor of 10 is demonstrated. Parametric amplification of the secondaryrnmotion, the motion excited by the Coriolis force, by a factor 14 are discussed.

机译：本文报告了应用于MEMS陀螺仪的参数放大的实验结果。在此工作中，演示了振动的主要模式和感测模式的参数放大。对于主模式，开环放大率接近两个数量级。在闭环运行中，演示了将主模式放大10倍。讨论了二次运动的参数放大，该二次运动是由科里奥利力激发的运动，其倍数为14。

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来源
《Device packaging 2010》|2010年|p.1-6|共6页
会议地点 Scottsdale/Fountain Hills AZ(US)
作者
Z. X. Hu; B.J. Gallacher; K.M. Harish; J.S. Burdess;
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原文格式 PDF
正文语种 eng
中图分类制造工艺;
关键词
parametric excitation; parametric amplification; resonance;

机译：参数激励参数放大谐振;

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2. Parametric resonance: Amplification and damping in MEMS gyroscopes [J] . Sharma M., Sarraf E.H., Baskaran R., Sensors and Actuators, A. Physical . 2012,第Null期

机译：参数共振：MEMS陀螺仪中的放大和阻尼
3. A parametrically amplified MEMS rate gyroscope [J] . Hu Z.X., Gallacher B.J., Burdess J.S., Sensors and Actuators, A. Physical . 2011,第2期

机译：参数放大的MEMS速率陀螺仪
4. The Parametric Amplification in MEMS Gyroscopes Based on Triple Resonant Frequency Signal [C] . Kai Wu, Kuo Lu, Qingsong Li, IEEE International Symposium on Inertial Sensors and Systems . 2021

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5. A study of parametric excitation applied to a MEMS tuning fork gyroscope. [D] . Lee, Yongsik. 2007

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6. Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope [O] . Sarah H. Nitzan, Valentina Zega, Mo Li, -1

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7. Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope [O] . S.H. Nitzan, V. Zega, M. Li, 2015

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8. Optical parametric generation and amplification of intense tunable femtosecond pulses by a regeneratively-amplified Ti:Sapphire laser [R] . Greenfield, Wasielewski, M R 1994

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A Parametrically Amplified MEMS Gyroscope

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