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Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

机译：铁电薄膜的微波测量：技术，误差和局限性

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This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection and resonance type measurements. Algorithms are presented for evaluation of capacitance-permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance-permittivity, the dielectric loss, and the associated error.

机译：本文研究了评估用作平面电容器的铁电薄膜的微波特性的问题。考虑了两种类型的铁电薄膜微波测量：反射和共振类型测量。提出了用于评估电容率和介电损耗的算法。使用灵敏度分析，可以估算与这些测量相关的误差和限制。最终结果是一系列公式，这些公式使用网络分析仪的测量数据来计算电容率，介电损耗和相关的误差。

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来源
《Ferroelectric Thin Films XII》|2003年|P.307-312|共6页
会议地点 Boston MA(US);Boston MA(US)
作者
Peter Kr. Petrov;
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作者单位

Centre for Physical Electronics and Materials, FESBE, London South Bank University, London, SE1 0AA, UK;

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原文格式 PDF
正文语种 eng
中图分类材料;
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专利

1. Techniques for microwave measurements of ferroelectric thin films and their associated error and limitations [J] . P K Petrov, N McN Alford Measurement Science & Technology . 2005,第2期

机译：铁电薄膜微波测量技术及其相关的误差和局限性
2. Unpatterned Ferroelectric Thin Film Measurements for Optimization of Perovskite Oxide Thin Film Based Microwave Devices [J] . M. W. Cole, R. G. Geyer, W. D. Nothwang Ferroelectrics: Letters Section . 2006,第1期

机译：用于优化钙钛矿氧化物薄膜微波器件的无图案铁电薄膜测量
3. Direct measurement of mechanical properties of (Pb,La)TiO_3 ferroelectric thin films using nanoindentation techniques [J] . M.Alguero, A.J.Bushby, M.J.Reece Journal of Materials Research . 2001,第4期

机译：使用纳米压痕技术直接测量（Pb，La）TiO_3铁电薄膜的机械性能
4. Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations [C] . Peter Kr. Petrov, Materials Research Society, Symposium Proceedings v.784 MRS Meeting . 2004

机译：铁电薄膜的微波测量：技术，误差和限制
5. Integration of ferroelectric thin films in microwave devices . [D] . Lam, Peter Gaifun. 2010

机译：微波器件中铁电薄膜的集成。
6. Ferroelectric BaTiO3/SrTiO3 multilayered thin films for room-temperature tunable microwave elements [O] . Ming Liu, Chunrui Ma, Gregory Collins, 2013

机译：用于室温可调微波元件的铁电BaTiO3 / SrTiO3多层薄膜
7. Measurements and analysis of microwave nonlinearities in ferroelectric thin film transmission lines [O] . Mateu Mateu, Jordi, Booth, James C., Schima, S. A., 2006

机译：铁电薄膜传输线微波非线性的测量与分析
8. Studies of ferroelectric heterostructure thin films and interfaces via in situ211 analytical techniques [R] . Auciello, O., Dhote, A., Gao, Y., 1999

机译：studies of ferroelectric heterostructure thin films and interfaces via in situ211 analytical techniques

Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

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