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首页> 外文会议>Fifth International Conference on Optical and Photonics Engineering >A Digital Holography Microscopy System for DOE Measurement
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A Digital Holography Microscopy System for DOE Measurement

机译：用于DOE测量的数字全息显微系统

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A Diffractive Optical Element (DOE) is passive optical component containing complex micro structure patterns which can transform light in predetermined way. It can realize almost all the same optical functions as conventional refractive optics such as lenses, prisms or aspheric lenses. The micro-structured surface relief profile has three dimensional features with widths and depth tolerance on the order of micrometers or less. Thus any minor error in design or fabrication will result in huge deviation from the desired optical function and performance. Therefore measurements of DOE before and after fabrication are important. The objective of this system is to measure DOE prior to and after fabrication for both design verification and fabrication quality validation. Digital Holography Microscopy (DHM) method is the methodology to be implemented. The measurement of the DOE design before the real sample being fabricated is realized by using a liquid crystal spatial light modulator (LCSLM) loaded with designed DOE pattern simulating the DOE sample. Featured with low cost, non-invasive, real-time, high-resolution and full-field measurement for entire effective area of DOE, the system is versatile in measuring different types of DOE.
机译：衍射光学元件（DOE）是包含复杂微结构图案的被动光学组件，可以按预定方式转换光。它可以实现几乎与常规折射光学系统（如透镜，棱镜或非球面透镜）相同的光学功能。微结构化的表面起伏轮廓具有三维特征，其宽度和深度公差为微米或更小量级。因此，设计或制造中的任何细微误差都会导致与所需光学功能和性能的巨大偏差。因此，制造前后DOE的测量很重要。该系统的目的是在制造之前和之后测量DOE，以进行设计验证和制造质量验证。数字全息显微术（DHM）方法是要实现的方法。通过使用装有模拟DOE样品的设计DOE图案的液晶空间光调制器（LCSLM），可以在制造实际样品之前对DOE设计进行测量。该系统具有低成本，无创，实时，高分辨率和全场测量的DOE整个有效区域，具有多功能性，可以测量不同类型的DOE。

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