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A Digital Holography Microscopy System for DOE Measurement

机译：用于DOE测量的数字全息显微镜系统

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摘要

A Diffractive Optical Element (DOE) is passive optical component containing complex micro structure patterns which can transform light in predetermined way. It can realize almost all the same optical functions as conventional refractive optics such as lenses, prisms or aspheric lenses. The micro-structured surface relief profile has three dimensional features with widths and depth tolerance on the order of micrometers or less. Thus any minor error in design or fabrication will result in huge deviation from the desired optical function and performance. Therefore measurements of DOE before and after fabrication are important. The objective of this system is to measure DOE prior to and after fabrication for both design verification and fabrication quality validation. Digital Holography Microscopy (DHM) method is the methodology to be implemented. The measurement of the DOE design before the real sample being fabricated is realized by using a liquid crystal spatial light modulator (LCSLM) loaded with designed DOE pattern simulating the DOE sample. Featured with low cost, non-invasive, real-time, high-resolution and full-field measurement for entire effective area of DOE, the system is versatile in measuring different types of DOE.
机译：衍射光学元件（DOE）是包含复杂微结构图案的无源光学元件，其可以以预定方式转换光。它可以实现几乎所有相同的光学功能作为传统折射光学器件，例如镜片，棱镜或非球面镜片。微结构化表面浮雕轮廓具有三维特征，宽度和宽度的宽度和深度容差。因此，设计或制造中的任何小错误都会导致巨大偏差与所需的光学功能和性能巨大。因此，在制造前后的DOE测量很重要。该系统的目的是在制造之前和之后测量DOE，用于设计验证和制造质量验证。数字全息显微镜（DHM）方法是要实施的方法。通过使用装载有设计的DOE图案的液晶空间光调制器（LCSLM）来实现在制造的真实样品之前的DOE设计的测量。为整个有效面积的低成本，无侵入性，实时，高分辨率和全场测量为特色，该系统在测量不同类型的DOE方面是多功能的。

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