SIMULATION OF CONVECTIVE TRANSFER OF OXYGEN AT GROWTH OF CRYSTALS OF SILICON BY CZOCHRALSKI METHOD

机译：直拉法模拟硅晶体生长过程中氧的对流传递

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The mathematical model and code for calculation of processes of silicon crystals growth by Czoehralski method taking into account forced, thermogravitational and thermocapillary convection, and also conductive and radiation heat exchange is developed. The calculations of convection transfer of oxygen impurity are carried out at action of all kinds of convection separately, and in various combinations.

机译：开发了用Czoehralski方法计算硅晶体生长过程的数学模型和代码，该模型考虑了强制，热引力和热毛细对流以及传导和辐射热交换。氧杂质的对流转移的计算是分别在各种对流的作用下进行的，并且以各种组合进行。

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《Fourth International Conference on Single Crystal Growth and Heat amp; Mass Transfer (ICSC - 2001) Vol.4; Sep 24-28, 2001; Obninsk, Russia》|2001年|p.913-920|共8页
会议地点 Obninsk(RU);Obninsk(RU)
作者
V.P.Ginkin; V.K.Arlemyev; V.I.Folomeev; T.M.Luhanova; Kh.I.Makeev; A.N.Shotaev; T.V.Bafashova; M.V.Batashov;
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正文语种 eng
中图分类无线电电子学、电信技术;
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1. Comparison of measurements and numerical simulations of melt convection in Czochralski crystal growth of silicon [J] . Sven Enger, Oliver Grabner, Georg Muller Journal of Crystal Growth . 2001,第1a2期

机译：硅切克劳斯基结晶生长中熔体对流的测量和数值模拟比较
2. Numerical simulation of the oxygen distribution in silicon melt for different argon gas flow rates during Czochralski silicon crystal growth process [J] . Zumrotul Ida, Jyh-Chen Chen, Thi Hoai Thu Nguyen MATEC Web of Conferences . 2018,第5期

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3. Simulation of ultrasound influence on melt convection for the growth of Ga_xIn_(1-x)Sb and Si single crystals by the Czochralski method [J] . G.N. Kozhemyakin, L.V. Nemets, A.A. Bulankina Ultrasonics . 2014,第8期

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4. SIMULATION OF CONVECTIVE TRANSFER OF OXYGEN AT GROWTH OF CRYSTALS OF SILICON BY CZOCHRALSKI METHOD [C] . V.P.Ginkin, V.K.Arlemyev, V.I.Folomeev, International conference on single crystal growth and heat mass transfer . 2001

机译：CZOCHRALSKI法模拟氧气生长氧化晶体的对流转移
5. Numerical analysis of heat and momentum transfer in the growth of yttrium aluminum garnet crystals by the Czochralski method. [D] . Bohenek, Michael. 1991

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6. Calculation of the convective heat transfer coefficient and thermal diffusivity of cucumbers using numerical simulation and the inverse method [O] . Wilton Pereira da Silva, Cleide M. D. P. S. e Silva 2014

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7. Numerical simulation of convection and heat transfer in Czochralski crystal growth by multiple-relaxation-time LBM [O] . Ding Liu, Weichao Huang, Ni Zhang 2017

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SIMULATION OF CONVECTIVE TRANSFER OF OXYGEN AT GROWTH OF CRYSTALS OF SILICON BY CZOCHRALSKI METHOD

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