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Advanced dry and steam laser cleaning of opaque and transparent critical substrates

机译:对不透明和透明的关键基材进行高级干法和蒸汽激光清洗

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摘要

Dry and steam laser cleaning, DLC and SLC, of nano-and micro-contaminant particles from UV/vis opaque and transparent critical substrates has been studied in front-side laser illumination geometry with the help of time-resolved optical techniques and broadband photoacoustic spectroscopy using a nanosecond 10.6μm TEA CO_2-laser and different absorbing energy transfer media (ETM) fluids. Corresponding basic DLC and SLC mechanisms for removal of nano-and micro-particles from opaque and transparent critical substrates as well as parameters of explosive removal of ETM fluids have been determined and discussed.
机译:借助时间分辨光学技术和宽带光声光谱技术,对前/后激光照射几何学中的来自紫外/可见光不透明和透明关键性基材的纳米和微污染物颗粒进行了干法和蒸汽激光清洗,DLC和SLC的研究使用了纳秒级的10.6μmTEA CO_2激光和不同的吸收能量转移介质(ETM)流体。已经确定并讨论了用于从不透明和透明的关键基材上去除纳米和微粒的相应基本DLC和SLC机制,以及爆炸性去除ETM流体的参数。

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