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Advanced Laser Micromachining Processes for MEMS and Optical Applications

机译：适用于MEMS和光学应用的高级激光微加工工艺

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摘要

Laser micromachining has great potential as a MEMS (micro-electro-mechanical systems) fabrication technique because of its materials flexibility and 3D capabilities. The machining of deep polymer structures with complex, well-defined surface profiles is particularly relevant to microfluidics and micro-optics, and in this paper we review recent work on the use of projection ablation methods to fabricate structures and devices aimed at these application areas. In particular we focus on two excimer laser micromachining techniques that are capable of both 3D structuring and large-area machining: synchronous image scanning (SIS) and workpiece dragging with half-tone masks. The methods used in mask design are reviewed, and experimental results are presented for test structures fabricated in polycarbonate. Both techniques are shown to be capable of producing accurately dimensioned structures that are significantly deeper than the focal depth of the projection optics and virtually free from fabrication artifacts such as the steps normally associated with multiple-mask processes.
机译：激光微机械加工由于其材料的灵活性和3D功能而具有作为MEMS（微机电系统）制造技术的巨大潜力。具有复杂，定义明确的表面轮廓的深聚合物结构的加工与微流体和微光学特别相关，在本文中，我们回顾了有关使用投射消融方法制造针对这些应用领域的结构和设备的最新工作。特别是，我们专注于能够进行3D结构化和大面积加工的两种准分子激光微加工技术：同步图像扫描（SIS）和带有半色调掩模的工件拖动。审查了掩模设计中使用的方法，并给出了用聚碳酸酯制造的测试结构的实验结果。两种技术均显示出能够产生尺寸精确的结构，该结构比投影光学器件的焦深深得多，并且实际上没有制造伪影，例如通常与多掩模工艺相关的步骤。

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