Design, fabrication, and characterization of an ultraviolet silicon sensor

机译：紫外硅传感器的设计，制造和表征

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In this work a Silicon/Silicon Rich Oxide (SRO) Ultraviolet detector is designed, fabricated and characterized. This device increases the silicon detection range to the ultraviolet region (200-300nm). Besides the fabrication process of this detector is compatible with standard silicon technology that makes it cheaper than commercial UV detectors.

机译：在这项工作中，对硅/富硅（SRO）紫外线探测器进行了设计，制造和表征。该装置将硅的检测范围扩大到紫外线区域（200-300nm）。此外，该检测器的制造过程与标准硅技术兼容，这使其比市售UV检测器便宜。

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来源
《ICO20: Optical Devices and Instruments》|2005年|P.60242L.1-60242L.6|共6页
会议地点 Changchun(CN)
作者
D. Berman-Mendoza; M. Aceves-Mijares; L. R. Berriel-Valdos; Z. Yu; C. Falcony; C. Dominguez-Horna; Jorge Pedraza;
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INAOE, Apdo. 51, Puebla, Puebla, 72000, tel. (01222) 2663100 ext. 1403 Mexico;

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原文格式 PDF
正文语种 eng
中图分类光学仪器;
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Design, fabrication, and characterization of an ultraviolet silicon sensor

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