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Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern

机译：使用正弦振动干涉图样测量金属圆柱体的直径

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A method for measuring diameters of metal cylinders is proposed. In this method a sinusoidally vibrating interference pattern (SVIP) of 100μm-period is used to generate an exact spatial scale along x-axis. Detection of the amplitude and the phase of the SVIP are carried out easily and exactly with sinusoidal phase-modulating interferometry. First, phase values of the SVIP on the pixels of the CCD image sensor are measured as the exact scale along the x-axis. Next, an image of the end-points of the cylinder surface is formed by extracting lights from the end-points of the cylinder. The phase of the SVIP on the end-point of the cylinder appears at a position where the amplitude of the image has maximum value along the x-axis. The x-coordinate of the end-point of the metal cylinder is calculated from the phase value of the end-point and the exact scale. The diameter is obtained from the x-coordinates of the two end-points. Metal cylinders of 9mm and 8mm-diameters are measured with an error of about ±2μm.
机译：提出了一种测量金属圆柱体直径的方法。在此方法中，周期为100μm的正弦振动干涉图（SVIP）用于沿x轴生成精确的空间比例。 SVIP的幅度和相位的检测可以通过正弦相位调制干涉仪轻松，准确地进行。首先，将CCD图像传感器像素上SVIP的相位值测量为沿x轴的精确比例。接下来，通过从圆柱体的端点提取光来形成圆柱体表面的端点的图像。 SVIP在圆柱体端点上的相位出现在图像振幅沿x轴具有最大值的位置。根据终点的相位值和精确比例计算金属圆柱体终点的x坐标。直径是从两个端点的x坐标获得的。直径为9mm和8mm的金属圆柱体的测量误差约为±2μm。

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