首页> 外文会议>IMAPS 40th international symposium on microelectronics >Formation and Growth of Intermetallic Compounds at the Interface between Pb-free Solder and Cu-Zn alloy UBM
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Formation and Growth of Intermetallic Compounds at the Interface between Pb-free Solder and Cu-Zn alloy UBM

机译:无铅焊料与Cu-Zn合金UBM之间界面处金属间化合物的形成和生长

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Sn-Ag-Cu(SAC) solder containing a small amount of Zn has been revealed to be beneficial in suppressing the formation and growth of intermetallic compounds(IMCs) at the solder joints. In this study,Instead of adding Zn into the SAC solder,we used Cu-20wt%Zn alloy UBM,which was deposited on the Cu pads using electroplating to improve the easy oxidation of solder alloy system including Zn. The growth of interfacial IMCs between SAC solder and Cu-Zn UBM were investigated during soldering at 260 for 20s and ℃ thermal aging at 150℃ up to 1000 h,and compared with Cu UBM. In the case of Cu UBM,a typical bilayer of Cu6Sn5 and Cu3Sn was observed at the solder joint interfaces. The growth rate of Cu-Sn IMC layers was much higher than that on Cu- Zn UBM. While in the case of Cu-Zn UBM,the growth of Cu-Sn IMC layers and the formation of large Ag3Sn plates at the solder joints were remarkably depressed by Zn element in Cu-Zn UBM. Especially,Cu3Sn IMC layer was strongly suppressed during thermal aging. In addition,Kirkendall voids were not formed at the SAC solder/Cu-Zn UBM interface.
机译:含有少量Zn的Sn-Ag-Cu(SAC)焊料已被证明有利于抑制焊点处金属间化合物(IMC)的形成和生长。在本研究中,我们使用Cu-20wt%Zn合金UBM代替在SAC焊料中添加Zn,该UBM通过电镀沉积在Cu焊盘上,以改善含Zn的焊料合金体系的易氧化性。研究了SAC焊料和Cu-Zn UBM之间的界面IMC的生长,在260℃焊接20s,在150℃下热老化1000h,并与Cu UBM进行了比较。对于Cu UBM,在焊点界面处观察到典型的Cu6Sn5和Cu3Sn双层。 Cu-Sn IMC层的生长速率远高于Cu-Zn UBM。而在Cu-Zn UBM中,Cu-Zn UBM中的Zn元素显着抑制了Cu-Sn IMC层的生长和焊点处较大的Ag3Sn板的形成。特别是,在热时效过程中,Cu3Sn IMC层被强烈抑制。此外,在SAC焊料/ Cu-Zn UBM界面上未形成Kirkendall空隙。

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