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首页> 外文会议>Infrared Technology and Applications XXXIII pt.2; Proceedings of SPIE-The International Society for Optical Engineering; vol.6542 pt.2 >Fabry-Perot MEMS microspectrometers spanning the SWIR and MWIR
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Fabry-Perot MEMS microspectrometers spanning the SWIR and MWIR

机译：跨越SWIR和MWIR的Fabry-Perot MEMS显微光谱仪

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We have previously developed a SWIR microspectrometer based on monolithic integration of a parallel plate Micro-Electro-Mechanical Systems (MEMS) optical filter directly with a Hg_xCd_(1-x)Te-based infrared detector. The primary technical challenge in achieving the integration of a MEMS Fabry-Perot filter with the Hg_xCd_(1-x)Te detector is to keep the processing temperature less than 150℃, as the performance of Hg_xCd_(1-x) Te based photoconductors degrade at higher process temperatures. In this work we present our results to extend the operation into the 3-5 μm (MWIR) wavelength range. For our preliminary results, the MWIR microspectrometer was based on a hybrid packaging approach, fabricating the MWIR filter separately from the Hg_xCd_(1-x) Te detector; however the key process parameters relating to temperature control were maintained during fabrication of the MWIR filter, ensuring we can migrate this technology into an integrated solution. Linewidths of 210 nm, switching times of 20 μs and a tuning range of 900 nm have been achieved. The tuning speed is limited by squeezed film damping due to the physically narrow gap (λ/2) between the Fabry-Perot mirrors.
机译：我们之前已经开发了一种SWIR显微光谱仪，该光谱仪基于直接将平行板微机电系统（MEMS）滤光片与基于Hg_xCd_（1-x）Te的红外探测器进行单片集成。将MEMS Fabry-Perot滤波器与Hg_xCd_（1-x）Te检测器集成在一起的主要技术挑战是，随着基于Hg_xCd_（1-x）Te的光电导体性能下降，保持处理温度低于150℃。在更高的过程温度下。在这项工作中，我们展示了将操作扩展到3-5μm（MWIR）波长范围的结果。对于我们的初步结果，MWIR光谱仪基于混合包装方法，与Hg_xCd_（1-x）Te检测器分开制造MWIR滤波器；然而，与温度控制相关的关键工艺参数在MWIR滤波器的制造过程中得以保留，从而确保我们可以将该技术移植到集成解决方案中。线宽为210 nm，切换时间为20μs，调谐范围为900 nm。由于Fabry-Perot反射镜之间的物理间隙很小（λ/ 2），因此压缩速度受到薄膜阻尼的限制。

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