Structure and Optical Properties of Al_(1-x)Sc_xN Thin Films

著录项

• 来源
  《Inorganic thin films and coatings》|2012年|140-143|共4页
• 会议地点 Guilin(CN)
• 作者

  Jing Yang; Miaomiao Cao; Yudong Li; Yigang Chen;

  展开▼
• 作者单位

  Department of Electronic Information Materials, School of Materials Science and Engineering,Shanghai University, 149 Yanchang Road, Shanghai 200072, China;

  Department of Electronic Information Materials, School of Materials Science and Engineering,Shanghai University, 149 Yanchang Road, Shanghai 200072, China;

  Department of Electronic Information Materials, School of Materials Science and Engineering,Shanghai University, 149 Yanchang Road, Shanghai 200072, China;

  Department of Electronic Information Materials, School of Materials Science and Engineering,Shanghai University, 149 Yanchang Road, Shanghai 200072, China;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Thin film; Scandium; Aluminum Nitride; Structure; Optical property;

  机译：薄膜;钪;氮化铝;结构体;光学性质;