A VERY LOW ENERGY ELECTRON COLUMN FOR SURFACE STUDIES

机译：用于表面研究的非常低能量的电子柱

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We report on the development of a small size (9 cm in length and 4.5 in diameter) all electrostatic field emission column for use in surface analysis and very low energy studies. The column focuses a beam of electrons over the energy range 1-10,000 eV through the use of the cathode lens mode. The cathode lens mode employs an in-lens electron detector, which is placed between the gun lens and the objective lens. An electron beam diameter of 80 nm and beam current of order 10~(-9)A are predicted for a working distance of 5 mm and electron beam energy of 5 keV. When the column is operated in the cathode lens mode, an electron beam diameter <250 nm at 10 eV is expected.

机译：我们报告了一种用于表面分析和超低能量研究的小尺寸（长9厘米，直径4.5毫米）全静电场发射柱的开发情况。通过使用阴极透镜模式，该柱将电子束聚焦在1-10,000 eV的能量范围内。阴极透镜模式采用透镜内电子检测器，该电子检测器位于枪镜和物镜之间。对于5mm的工作距离和5keV的电子束能量，预测了80nm的电子束直径和10〜（-9）A量级的束流。当该柱以阴极透镜模式运行时，在10 eV时电子束直径应小于250 nm。

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来源
《Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee》|2001年|p.111-114|共4页
会议地点 Dundee(GB);Dundee(GB)
作者
M El-Gomati; V Romanovsky; L Frank; I Mullerova;
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作者单位

Department of Electronics, University of York, York YO10 5DD;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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4. A VERY LOW ENERGY ELECTRON COLUMN FOR SURFACE STUDIES [C] . M El-Gomati, V Romanovsky, L Frank, Institute of Physics Electron Microscopy and Analysis Group conference . 2001

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A VERY LOW ENERGY ELECTRON COLUMN FOR SURFACE STUDIES

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