3D-EFTEM: tomographic reconstruction from tilt series of energy loss images

机译：3D-EFTEM：根据能量损失图像的倾斜序列进行层析成像重建

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The contrast in energy filtered transmission electron microscopy (EFTEM) compositional maps is ideally suited to the reconstruction of the 3D elemental distribution of crystalline specimens using electron tomography. This paper presents two examples of such 3D-EFTEM. It is found that the signal-to-noise ratio (SNR) is an important limiting factor to the technique and that there are significant problems to avoid during acquisition. With adequate consideration of these problems however 3D-EFTEM is shown to be a viable and potentially very powerful technique for 3D chemical mapping.

机译：能量过滤透射电子显微镜（EFTEM）成分图中的对比度非常适合使用电子断层扫描重建晶体样品的3D元素分布。本文介绍了此类3D-EFTEM的两个示例。发现信噪比（SNR）是该技术的重要限制因素，并且在采集过程中要避免许多重大问题。在充分考虑这些问题的情况下，3D-EFTEM被证明是一种可行的且可能非常强大的3D化学制图技术。

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来源
《Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee》|2001年|p.239-242|共4页
会议地点 Dundee(GB);Dundee(GB)
作者
M Weyland; P A Midgley;
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作者单位

Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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3D-EFTEM: tomographic reconstruction from tilt series of energy loss images

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