首页> 外文会议>Instrumentation and Measurement Technology Conference, 2009. I2MTC '09 >Determination of the reference impedance of Line - Attenuator - Reflect for on-wafer vector network analyzer calibration
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Determination of the reference impedance of Line - Attenuator - Reflect for on-wafer vector network analyzer calibration

机译:确定晶片上矢量网络分析仪的线-衰减器-反射参考阻抗的确定。

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摘要

A determination of the reference impedance for the three standards line-attenuator-reflect (LAR) on-wafer vector network-analyzer (VNA) calibration is proposed. As a result, it is shown that the reference impedance to which the LAR calibration is referred cannot generally be determined. Based on this consideration, a modified LAR calibration allows a precise determination of the reference impedance so that the calibration accuracy is improved. Measurement results, compared to those obtained using the conventional multiline TRL calibration, show the efficiency of the proposed method up to 45 GHz.
机译:提出了三种标准线衰减器反射(LAR)晶圆上矢量网络分析仪(VNA)校准的参考阻抗的确定方法。结果表明,通常无法确定LAR校准所参考的参考阻抗。基于此考虑,改进的LAR校准可精确确定参考阻抗,从而提高校准精度。与使用常规多线TRL校准获得的测量结果相比,测量结果表明,所提方法的效率高达45 GHz。

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