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Vector network analyzer calibration for multiport measurement on semiconductor wafer, involves performing calibration measurement at multiple-fold one-port using known impedances and unknown reflective terminations, respectively
Vector network analyzer calibration for multiport measurement on semiconductor wafer, involves performing calibration measurement at multiple-fold one-port using known impedances and unknown reflective terminations, respectively
Several calibration measurements are performed at a two-port of vector network analyzer, by connecting measurement ports directly or through short matched line of known length and attenuation. Calibration measurement of multiple-fold one-port is performed using known impedances, unknown reflective terminations that are similar to short or open circuit, respectively, for determining reflexion accounts of ports.
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