Network analyzer calibration for cryogenic on-wafer measurements

机译：用于低温晶圆上测量的网络分析仪校准

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摘要

A cryogenic probe station for on-wafer microwave measurements has been developed at Sandia National Laboratories to explore the basic device physics and characterize advanced components for low-temperature applications. The station was designed to operate over a temperature range of 20 to 300 K with a frequency range of DC to 50 GHz. Due to the vacuum and the low temperature environment, the use of microwave probes and the calibration of network analyzer measurements are somewhat elaborate. This paper presents guidelines for probe use and calibration in this environment.

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作者
Hietala, V M; Housel; Caldwell, R B;
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年度 1994
页码 1-13
总页数 13
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
EDB/426000; EDB/440800; Electric probes; Wafers;

机译：EDB / 426000; EDB / 440800;电探针;晶圆;

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专利

1. A calibration and measurement method of a tri-six-port network analyzer suitable for on-wafer characterization of three-port devices [J] . Ghannouchi F.M. IEEE Transactions on Instrumentation and Measurement . 1993,第4期

机译：适用于三端口设备的晶圆特征的三六端口网络分析仪的校准和测量方法
2. Broadband Space Conservative On-Wafer Network Analyzer Calibrations With More Complex Load and Thru Models [J] . Sathya Padmanabhan, Lawrence Dunleavy, John E. Daniel, IEEE Transactions on Microwave Theory and Techniques . 2006,第9期

机译：具有更复杂的负载和直通模型的宽带空间节约型晶片网络分析仪校准
3. On-Wafer Calibration Algorithm for Partially Leaky Multiport Vector Network Analyzers [J] . Valeria Teppati, Andrea Ferrero IEEE Transactions on Microwave Theory and Techniques . 2005,第11期

机译：部分泄漏的多端口矢量网络分析仪的晶圆校准算法
4. Determination of the reference impedance of Line - Attenuator - Reflect for on-wafer vector network analyzer calibration [C] . Bahouche M., Bergeault E., Allal D. Instrumentation and Measurement Technology Conference, 2009. I2MTC '09 . 2009

机译：确定晶片上矢量网络分析仪的线-衰减器-反射参考阻抗的确定。
5. Measurement-based modeling of vector network analyzer calibration standards and nonlinear microwave devices using artificial neural networks. [D] . Jargon, Jeffrey Arendt. 2003

机译：矢量网络分析仪校准标准和基于人工神经网络的非线性微波设备的基于测量的建模。
6. A New Analyzer Based on Pellistor Sensor with Neural Network Data Postprocessing for Measurement of Hydrocarbons in Lower Explosive Limit Range [O] . Radosław Bandomir, Mariusz Krawczyk, Jacek Namieśnik 2005

机译：基于Pellistor传感器和神经网络数据后处理的新型分析仪用于测量爆炸下限范围内的碳氢化合物
7. Network Analyzer Calibration for Cryogenic On-Wafer Measurements [O] . Vincent M. Hietala, Mark S. Housel, Robert B. Caldwell 1994

机译：网络分析仪用于低温晶圆测量的校准
8. Network analyzer calibration for cryogenic on-wafer measurements [R] . Hietala, V. M., Housel, M. S., Caldwell, R. B. 1994

机译：用于低温晶圆上测量的网络分析仪校准

Network analyzer calibration for cryogenic on-wafer measurements

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