A calibration and measurement method of a tri-six-port network analyzer suitable for on-wafer characterization of three-port devices

Ghannouchi F.M.

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A calibration and measurement method of a tri-six-port network analyzer suitable for on-wafer characterization of three-port devices

机译：适用于三端口设备的晶圆特征的三六端口网络分析仪的校准和测量方法

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摘要

A calibration and measurement method using a wideband tri-six-port network and analyzer (TSPNA) is proposed. The scattering parameters of a three-port device under test are found to be the unknowns of a set of nine simultaneous complex linear equations. These equations are established via a group of three calibrated linearly independent excitations. No isolators are required for calibration and measurement procedures. Three unknown reciprocal two-port standards are needed for the calibration of the TSPNA. The proposed method is rigorous, explicit, and suitable for wideband on-wafer three-port device S-parameter measurements. It can easily be adapted for heterodyne automated network analyzers equipped with three reflection test-set units.

机译：提出了一种使用宽带三六端口网络和分析仪（TSPNA）的校准和测量方法。发现被测三端口设备的散射参数是一组九个同时存在的复杂线性方程组的未知数。这些方程式是通过一组三个校准的线性独立激励建立的。校准和测量过程不需要隔离器。 TSPNA的校准需要三个未知的双向两端口标准。所提出的方法严格，明确，适用于宽带晶圆上三端口设备的S参数测量。它可以轻松地应用于配备了三个反射测试装置的外差自动网络分析仪。

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《IEEE Transactions on Instrumentation and Measurement》 |1993年第4期|P.864-866|共3页
作者
Ghannouchi F.M.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类电工单位、电工计算;电气测量技术及仪器;
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2. Accuracy Improvement for Line-Series-Shunt Calibration in Broadband Scattering-Parameter Measurements With Applications of On-Wafer Device Characterization [J] . Huang C. C., Lin Y. H., Chang-Chien M. Y. Microwave Theory and Techniques, IEEE Transactions on . 2010,第9期

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3. An Impedance and Power Flow Measurement System Suitable for On-Wafer Microwave Device Large-Signal Characterization [J] . Walid S. El-Deeb, Souheil Bensmida, Noureddine Boulejfen, International journal of RF and microwave computer-aided engineering . 2010,第3期

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7. Network Analyzer Calibration for Cryogenic On-Wafer Measurements [O] . Vincent M. Hietala, Mark S. Housel, Robert B. Caldwell 1994

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A calibration and measurement method of a tri-six-port network analyzer suitable for on-wafer characterization of three-port devices

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