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首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN) >Optimum Design on Measurement Range of Comb-Finger Micro Silicon Accelerometer
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Optimum Design on Measurement Range of Comb-Finger Micro Silicon Accelerometer

机译：梳状微硅加速度计测量范围的优化设计

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摘要

It is found from the centrifuge test that the actual measurement range of the closed-loop comb-finger accelerometer is often less than the designed value. In order to gain the designed measurement range in real measurements, the optimum design on mechanical and electrical parameters of the accelerometer is investigated. Because the closed-loop capacitive accelerometer with PI controller is force-balanced, all the analysis are based on the electrostatic force generated by the forcer of the accelerometer. The maximum measurement range of the closed-loop accelerometer is determined by the mechanical parameters of the sensing element, but in real measurement, the accelerometer's electrical parameters affect the measurement range greatly. Therefore, to design a closed-loop accelerometer, a suitable sensing element should be select firstly according to the designed measurement range of the accelerometer. Then, to gain the maximum measurement range of the sensing element, the electrical parameters of the accelerometer, the DC preload voltage on the forcer and the output swing of the amplifier of the electrical circuit, are optimized. The design criteria for the electrical parameters are also provided. The measurement ranges of the accelerometer before and after the parameters optimum are compared, and the centrifuge test results are given. All the conclusions above are proved by the test results.
机译：从离心测试中发现，闭环梳指加速度计的实际测量范围通常小于设计值。为了在实际测量中获得设计的测量范围，研究了加速度计的机械和电气参数的最佳设计。因为带有PI控制器的闭环电容式加速度计是力平衡的，所以所有分析都是基于加速度计的力所产生的静电力。闭环加速度计的最大测量范围由传感元件的机械参数确定，但在实际测量中，加速度计的电气参数会极大地影响测量范围。因此，在设计闭环加速度计时，应首先根据加速度计的设计测量范围选择合适的传感元件。然后，为了获得传感元件的最大测量范围，优化了加速度计的电气参数，施力器上的DC预载电压以及电路放大器的输出摆幅。还提供了电气参数的设计标准。比较了最佳参数前后加速度计的测量范围，并给出了离心机的测试结果。测试结果证明了以上所有结论。

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